Structure and formation method of fin-like field effect transistor
View Patent ↗A structure and a formation method of a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a fin structure over the semiconductor substrate. The semiconductor device also includes a gate stack covering a portion of the fin structure and an epitaxially grown source/drain structure over the fin structure and adjacent to the gate stack. The semiconductor device further includes a semiconductor protection layer over the epitaxially grown source/drain structure. The semiconductor protection layer has an atomic concentration of germanium greater than that of the epitaxially grown source/drain structure.
1. A semiconductor device structure, comprising:
a semiconductor substrate;
a fin structure over the semiconductor substrate;
a gate stack covering a portion of the fin structure;
an epitaxially grown source/drain structure over the fin structure and adjacent to the gate stack; and
a semiconductor protection layer over the epitaxially grown source/drain structure, wherein the semiconductor protection layer has an atomic concentration of germanium greater than that of the epitaxially grown source/drain structure, and the atomic concentration of germanium in the semiconductor protection layer gradually decreases along a direction from a surface of the semiconductor protection layer towards the epitaxially grown source/drain structure.
2. The semiconductor device structure as claimed in claim 1 , wherein the semiconductor protection layer is in direct contact with the epitaxially grown source/drain structure.
3. The semiconductor device structure as claimed in claim 1 , wherein the semiconductor protection layer includes silicon and germanium.
4. The semiconductor device structure as claimed in claim 1 , wherein the semiconductor protection layer is made of a substantially pure germanium material.
5. The semiconductor device structure as claimed in claim 1 , wherein the atomic concentration of germanium in the semiconductor protection layer is in a range from about 10% to about 99%.
6. The semiconductor device structure as claimed in claim 1 , wherein the epitaxially grown source/drain structure is an n-type semiconductor material.
7. The semiconductor device structure as claimed in claim 1 , wherein the epitaxially grown source/drain structure is a p-type semiconductor material.
8. The semiconductor device structure as claimed in claim 1 , further comprising support elements covering a lower portion of the epitaxially grown source/drain structure, wherein the support elements are in direct contact with the epitaxially grown source/drain structure, and the support elements are between the semiconductor protection layer and the semiconductor substrate.
9. The semiconductor device structure as claimed in claim 1 , wherein the semiconductor protection layer has a first portion and a second portion, and the first portion is thinner than the second portion.
10. A semiconductor device structure, comprising:
a semiconductor substrate;
a first fin structure over the semiconductor substrate;
a first epitaxially grown source/drain structure over the first fin structure;
a second fin structure over the semiconductor substrate;
a second epitaxially grown source/drain structure over the second fin structure;
a first semiconductor protection layer over the first epitaxially grown source/drain structure, wherein the first semiconductor protection layer has an atomic concentration of germanium greater than that of the first epitaxially grown source/drain structure, and the atomic concentration of germanium in the first semiconductor protection layer gradually decreases along a direction from a surface of the first semiconductor protection layer towards the first epitaxially grown source/drain structure; and
a second semiconductor protection layer over the second epitaxially grown source/drain structure, wherein the second semiconductor protection layer has an atomic concentration of germanium greater than that of the second epitaxially grown source/drain structure.
11. The semiconductor device structure as claimed in claim 10 , wherein at least one of the first semiconductor protection layer and the second semiconductor protection layer is made of a substantially pure germanium material.
12. The semiconductor device structure as claimed in claim 10 , wherein the atomic concentration of germanium in the first semiconductor protection layer or the second semiconductor protection layer is in a range from about 10% to about 99%.
13. The semiconductor device structure as claimed in claim 10 , wherein the first epitaxially grown source/drain structure is an n-type semiconductor material, and the second epitaxially grown source/drain structure is a p-type semiconductor material.
14. A semiconductor device structure, comprising:
a semiconductor substrate;
a fin structure over the semiconductor substrate;
an epitaxially grown source/drain structure over the fin structure; and
a semiconductor protection layer over the epitaxially grown source/drain structure, wherein the semiconductor protection layer has an atomic concentration of a semiconductor element greater than that of the epitaxially grown source/drain structure, the atomic concentration of the semiconductor element of the semiconductor protection layer gradually decreases along a direction from a surface of the semiconductor protection layer towards the epitaxially grown source/drain structure, and the semiconductor element is not silicon.
15. The semiconductor device structure as claimed in claim 14 , wherein the semiconductor element is germanium.
16. The semiconductor device structure as claimed in claim 14 , wherein the semiconductor protection layer is in direct contact with the epitaxially grown source/drain structure.
17. The semiconductor device structure as claimed in claim 14 , further comprising an isolation feature over the semiconductor substrate, wherein the isolation feature surrounds the fin structure and a lower portion of the epitaxially grown source/drain structure.
18. The semiconductor device structure as claimed in claim 1 , further comprising:
a dielectric layer surrounding the epitaxially grown source/drain structure and the semiconductor protection layer; and
a contact hole in the dielectric layer, wherein a first portion of the semiconductor protection layer directly under the contact hole is thinner than a second portion of the semiconductor protection layer not directly under the contact hole.
19. The semiconductor device structure as claimed in claim 10 , further comprising:
a dielectric layer surrounding the first epitaxially grown source/drain structure and the first semiconductor protection layer; and
a contact hole in the dielectric layer, wherein a first portion of the first semiconductor protection layer directly under the contact hole is thinner than a second portion of the first semiconductor protection layer not directly under the contact hole.
20. The semiconductor device structure as claimed in claim 14 , further comprising:
a dielectric layer surrounding the epitaxially grown source/drain structure and the semiconductor protection layer; and
a contact hole in the dielectric layer, wherein a first portion of the semiconductor protection layer directly under the contact hole is thinner than a second portion of the semiconductor protection layer not directly under the contact hole.