Resistive random access memory devices formed on fiber and methods of manufacturing the same
Provided is a memory device formed on a fiber. The memory device includes a lower electrode, a memory resistance layer, and an upper electrode, which are sequentially formed on a surface of the fiber. The memory resistance layer may have variable resistance properties. The memory device may further include an intermediate electrode and a switching layer formed between the memory resistance layer and the upper electrode.
1. A resistive random access memory (RRAM) device formed on at least one fiber, the RRAM device comprising:
an insulating layer directly formed on the at least one fiber for planarization of a surface of the at least one fiber;
a lower electrode directly disposed on the insulating layer;
a memory resistance layer disposed on the lower electrode; and
an upper electrode disposed on the memory resistance layer.
2. The RRAM device of claim 1 , further comprising an intermediate electrode and a switching layer, wherein the intermediate electrode and the switching layer are interposed between the memory resistance layer and the upper electrode.
3. The RRAM device of claim 1 , wherein the at least one fiber is a natural fiber, a chemical fiber, or a combination thereof.
4. The RRAM device of claim 3 , wherein the at least one fiber comprises polystyrene, polyester, or polyurethane.
5. The RRAM device of claim 1 , wherein the at least one fiber has a diameter of 20 nm to 150 μm.
6. The RRAM device of claim 1 , wherein the at least one fiber is a unidirectional fabric, a quasi-unidirectional fabric, a flat yarn, or a nanofiber.
7. The RRAM device of claim 1 , wherein the memory resistance layer is formed of one selected from the group consisting of silicon oxide, tungsten oxide, niobium oxide, germanium antimony telluride (Ge 2 Sb 2 Te 5 ), zirconium zirconium oxide, hafnium oxide, silicon carbide (SiC), titanium oxide, tantalum oxide, praseodymium calcium manganese oxide (PrCaMnO), polyflourene based organic material, zinc oxide, aluminum oxide, Nb-doped strontium titanium oxide (SrTiO 3 ), vanadium vanadium oxide, Al—Nb co-doped lead zirconium titanium oxide (PbZrTiO), lanthanum aluminum oxide (LaAlO 3 ), Cu-doped molybdenum oxide, gadolinium oxide, lanthanide oxide, praseodymium oxide, dysprosium oxide, europium oxide, and copper carbide (CuC).
8. The RRAM device of claim 1 , further comprising a connection to a textile-based sensor system.