Method of manufacturing organic light-emitting display apparatus
A method of manufacturing an organic light-emitting display apparatus includes forming a pixel electrode, a bus electrode and a pixel defining layer on a same layer on a substrate, the pixel defining layer exposing a center of the pixel electrode and a portion of the bus electrode, forming an intermediate layer on the pixel-defining layer and on the pixel electrode and the bus electrode, orienting the substrate such that the intermediate layer is located underneath the substrate, forming an opening in the intermediate layer by irradiating the intermediate layer with a laser beam from underneath the intermediate layer to remove the intermediate layer on the bus electrode, exposing at least a portion of the bus electrode, and forming an opposite electrode such that the opposite electrode contacts the bus electrode via the opening in the intermediate layer.
1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming a pixel electrode and a bus electrode on a same layer on a substrate, the pixel electrode and the bus electrode being spaced apart and electrically insulated from each other;
forming a pixel-defining layer on the same layer and on the pixel electrode and the bus electrode such that at least a portion of the pixel electrode including a center of the pixel electrode and at least a portion of the bus electrode are exposed;
forming an intermediate layer on an upper surface of the pixel-defining layer disposed between the pixel electrode and the bus electrode, and on the pixel electrode and the bus electrode;
orienting the substrate such that the intermediate layer is located underneath the substrate with respect to a direction of gravity;
forming an opening in the intermediate layer by irradiating the intermediate layer with a laser beam from underneath the intermediate layer to remove the intermediate layer on the bus electrode such that at least a portion of the bus electrode is exposed; and
forming an opposite electrode corresponding to the pixel electrode and the bus electrode such that the opposite electrode contacts the bus electrode via the opening in the intermediate layer.
2. The method as claimed in claim 1 , wherein:
forming the opening includes emitting the laser beam from a laser source such that the laser beam reaches the intermediate layer after being reflected from a polygon mirror, and
the laser beam is irradiated onto a predetermined portion of the intermediate layer as the polygon mirror is rotated.
3. The method as claimed in claim 2 , wherein forming the opening includes irradiating the predetermined portion of the intermediate layer with the laser beam as the laser beam is discontinuously emitted from the laser source.
4. The method as claimed in claim 3 , wherein forming the opening is performed by irradiating predetermined portions of the intermediate layer with the discontinuously emitted laser beam while the polygon mirror is being rotated.
5. The method as claimed in claim 2 , wherein:
the substrate includes a major axis and a minor axis, and
forming the opening includes forming a plurality of openings in the intermediate layer along any one of the major axis and the minor axis of the substrate while the polygon mirror is being rotated.
6. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming a bus electrode on a substrate;
forming an insulating layer to cover the bus electrode;
forming a pixel electrode on the insulating layer;
forming a pixel-defining layer on the insulating layer such that a portion of the pixel electrode including a center of the pixel electrode is exposed;
forming an intermediate layer on the pixel-defining layer and the pixel electrode;
orienting the substrate such that the intermediate layer is located underneath the substrate with respect to a direction of gravity;
forming an opening in the intermediate layer by irradiating the intermediate layer with a laser beam from underneath the intermediate layer to remove the intermediate layer and the insulating layer on the bus electrode such that at least a portion of the bus electrode is exposed and such that particles generated in forming the opening in the intermediate layer fall away from the substrate by force of gravity; and
forming an opposite electrode corresponding to the pixel electrode and the bus electrode such that the opposite electrode contacts the bus electrode.
7. The method as claimed in claim 6 , wherein forming the bus electrode includes forming the bus electrode on a same layer as any one of a source electrode, a drain electrode, and a gate electrode of a thin film transistor (TFT).
8. The method as claimed in claim 6 , wherein:
forming the opening includes emitting the laser beam from a laser source such that the laser beam reaches the intermediate layer after being reflected from a polygon mirror, and
a predetermined portion of the intermediate layer is irradiated with the laser beam as the polygon mirror is rotated.
9. The method as claimed in claim 8 , wherein forming the opening includes irradiating the predetermined portion of the intermediate layer with the laser beam as the laser beam is discontinuously emitted from the laser source.
10. The method as claimed in claim 9 , wherein forming the opening is performed by irradiating predetermined portions of the intermediate layer with the discontinuously emitted laser beam while the polygon mirror is being rotated.
11. The method as claimed in claim 8 , wherein:
the substrate includes a major axis and a minor axis, and
forming the opening includes forming a plurality of openings in the intermediate layer along any one of the major axis and the minor axis of the substrate while the polygon mirror is being rotated.
12. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming a bus electrode on a substrate;
forming an insulating layer on the substrate and on the bus electrode such that the bus electrode is exposed by a bus electrode hole formed in the insulating layer;
forming a pixel electrode on the insulating layer;
forming a pixel-defining layer on the insulating layer such that at least a portion of the bus electrode exposed via the bus electrode hole continues to be exposed, and such that at least a portion of the pixel electrode including a center of the pixel electrode is exposed;
forming an intermediate layer on the pixel-defining layer, the pixel electrode, and the bus electrode;
orienting the substrate such that the intermediate layer is located underneath the substrate with respect to a direction of gravity;
forming an opening in the intermediate layer by irradiating the intermediate layer with a laser beam from underneath the intermediate layer to remove the intermediate layer on the bus electrode such that at least a portion of the bus electrode is exposed and such that particles generated in forming the opening in the intermediate layer fall away from the substrate by force of gravity; and
forming an opposite electrode corresponding to the pixel electrode and the bus electrode such that the opposite electrode contacts the bus electrode.
13. The method as claimed in claim 12 , wherein forming the bus electrode includes forming the bus electrode on a same layer as any one of a source electrode, a drain electrode, and a gate electrode of a thin film transistor (TFT).
14. The method as claimed in claim 12 , wherein:
forming the at least one opening includes emitting the laser beam from a laser source such that the laser beam reaches the intermediate layer after being reflected from a polygon mirror, and
a predetermined portion of the intermediate layer is irradiated with the laser beam as the polygon mirror is rotated.
15. The method as claimed in claim 14 , wherein forming the opening includes irradiating the predetermined portion of the intermediate layer with the laser beam as the laser beam is discontinuously emitted from the laser source.
16. The method as claimed in claim 15 , wherein forming the opening is performed by irradiating predetermined portions of the intermediate layer with the discontinuously emitted laser beam while the polygon mirror is being rotated.
17. The method as claimed in claim 14 , wherein:
the substrate includes a major axis and a minor axis, and
forming the at least one opening includes forming a plurality of openings in the intermediate layer along any one of the major axis and the minor axis of the substrate while the polygon mirror is being rotated.