Enclosure and method for handling electron gun or ion gun
The present invention is a charged-particle gun (EG) in which a negative electrode ( 1 ) and a positive electrode ( 9 ) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor ( 11 ) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.
1. A method for handling an electron gun or an ion gun for storage or transportation, wherein the electron gun or the ion gun has a negative electrode and a positive electrode, said method comprising:
enclosing the electron gun or the ion gun in a container such that the negative and positive electrodes are electrically connected with a conductor, so as to provide an electrode gun or ion gun enclosed in a container comprising
the electron gun or the ion gun, and
the container,
wherein the electron gun or the ion gun is enclosed in the container with a conductor electrically connecting the negative and positive electrodes such that the negative and positive electrodes have an equal electric potential.
2. The method for handling an electron gun or an ion gun according to claim 1 , wherein the negative electrode or the positive electrode has a sharp end.
3. The method for handling an electron gun or an ion gun according to claim 2 , wherein the negative electrode or the positive electrode comprises tungsten.
4. The method for handling an electron gun or an ion gun according to claim 1 , wherein the electron gun or the ion gun is enclosed in a container, and the conductor that connects between the two electrodes includes a metal member for fixing a terminal of the electron gun or the ion gun to the container.
5. The method for handling an electron gun or an ion gun according to claim 4 , wherein the electron gun or the ion gun is enclosed in the container, and the elastic metal member is fixed to the container.
6. The method for handling an electron gun or an ion gun according to claim 1 , wherein the conductor that connects between the two electrodes includes an elastic metal member that is brought into contact with the negative electrode or the positive electrode by an elastic restoring force.
7. An electron gun or an ion gun enclosed in a container for storage or transportation comprising:
the electron gun or the ion gun, and
the container,
wherein the electron gun or the ion gun has a negative electrode and a positive electrode, and is enclosed in the container with a conductor electrically connecting the negative and positive electrodes such that the negative and positive electrodes have an equal electric potential.
8. The electron gun or an ion gun enclosed in a container according to claim 7 , wherein the negative electrode or the positive electrode has a sharp end.
9. The electron gun or an ion gun enclosed in a container according to claim 8 , wherein the negative electrode or the positive electrode comprises tungsten.
10. The electron gun or an ion gun enclosed in a container according to claim 7 , wherein the electron gun or the ion gun is enclosed in a container, and the conductor that connects between the two electrodes includes a metal member for fixing a terminal of the electron gun or the ion gun to the container.
11. The electron gun or an ion gun enclosed in a container according to claim 7 , wherein the conductor that connects between the two electrodes includes an elastic metal member that is brought into contact with the negative electrode or the positive electrode by an elastic restoring force.
12. The electron gun or an ion gun enclosed in a container according to claim 7 , wherein the electron gun or the ion gun is enclosed in the container and the elastic metal member is fixed to the container.