IP Library › Granted Patent US 9,502,371
Granted Patent B2
US 9,502,371 · App. 14/413,475 · Granted Nov 22, 2016

Methods of forming wire interconnect structures

Inventors: Thomas J. Colosimo, Jr. (Glenside, PA); Jon W. Brunner (Sellersville, PA)
Assignee: Kulicke and Soffa Industries, Inc.
H01L24/43H01L24/78H01L24/85H01L24/97H01L2224/432H01L2224/451H01L2224/45139H01L2224/4845H01L2224/48091H01L2224/48465H01L2224/78301H01L2224/78611H01L2224/78621H01L2224/851H01L2224/85045H01L2224/85181H01L2224/85201H01L2224/85203H01L2224/85205H01L2224/85207H01L2224/85365H01L2924/00014
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Quick Facts
Patent No.
US 9,502,371
App. No.
14/413,475
Granted
Nov 22, 2016
Kind
B2
Abstract

A method of forming a wire interconnect structure includes the steps of: (a) forming a wire bond at a bonding location on a substrate using a wire bonding tool; (b) extending a length of wire, continuous with the wire bond, to another location; (c) pressing a portion of the length of wire against the other location using the wire bonding tool; (d) moving the wire bonding tool, and the pressed portion of the length of wire, to a position above the wire bond; and (e) separating the length of wire from a wire supply at the pressed portion, thereby providing a wire interconnect structure bonded to the bonding location.

Claims (32)

1. A method of forming a wire interconnect structure, the method comprising the steps of:

(a) forming a wire bond at a bonding location on a substrate using a wire bonding tool;

(b) extending a length of wire, continuous with the wire bond, to a portion of the substrate different from the bonding location;

(c) pressing a portion of the continuous length of wire against the portion of the substrate using the wire bonding tool;

(d) moving the wire bonding tool, and the pressed portion of the length of wire, with the pressed portion of wire being continuous with the wire bond, to a position above the wire bond; and

(e) separating the continuous length of wire from a wire supply at the pressed portion, thereby providing a wire interconnect structure bonded to the bonding location.

2. The method of claim 1 wherein the pressing step partially cuts the portion of the length of wire to form a partially cut portion of the continuous length of wire.

3. The method of claim 1 further comprising a step of forming a free air ball that is used to form the wire bond in step (a).

4. The method of claim 3 wherein a bonding force and ultrasonic energy are used in forming the wire bond.

5. The method of claim 1 wherein a bond force is used in the pressing step (c).

6. The method of claim 5 wherein ultrasonic energy is not used with the bond force in the pressing step (c).

7. The method of claim 1 further comprising the step of: (d1) extending an additional length of wire from the bonding tool, and above the pressed portion of the continuous length of wire between steps (d) and (e).

8. The method of claim 7 further comprising the step of closing a wire clamp against an upper portion of wire after step (d1) and before step (e).

9. The method of claim 8 wherein the separating of step (e) includes raising the closed wire clamp and the wire bonding tool in separating the continuous length of wire from a wire supply at the pressed portion.

10. The method of claim 1 wherein steps (a)-(e) are repeated to form a plurality of wire interconnect structures.

11. The method of claim 1 further comprising the step of using the wire interconnect structure to electrically connect the substrate with another, adjacent substrate.

12. The method of claim 1 wherein the wire interconnect structure extends substantially vertical above the wire bond.

13. The method of claim 1 further comprising the step of closing a wire clamp against an upper portion of wire after step (d) and before step (e).

14. A method of forming a wire interconnect structure, the method comprising the steps of:

(a) forming a ball bond at a bonding location on a substrate using a wire bonding tool;

(b) extending a length of wire, continuous with the ball bond, to a portion of the substrate different from the bonding location;

(c) pressing a portion of the length of wire against the portion of the substrate using the wire bonding tool to partially cut a portion of the length of wire;

(d) moving the wire bonding tool, and the partially cut portion of the length of wire, with the partially cut portion of the length of wire being continuous with the wire bond, to a position above the ball bond;

(e) extending an additional length of wire from the wire bonding tool, and above the partially cut portion of the length of wire; and

(f) separating the length of wire from a wire supply at the partially cut portion, thereby providing a wire interconnect structure bonded to the bonding location, the wire interconnect structure extending substantially vertical above the ball bond.

15. The method of claim 14 further comprising a step of forming a free air ball that is used to form the ball bond in step (a).

16. The method of claim 14 wherein a bonding force and ultrasonic energy are used in forming the ball bond.

17. The method of claim 14 wherein a bond force is used in the pressing step (c).

18. The method of claim 17 wherein ultrasonic energy is not used with the bond force in the pressing step (c).

19. The method of claim 14 further comprising the step of closing a wire clamp against an upper portion of wire after step (e) and before step (f).

20. The method of claim 14 wherein steps (a)-(f) are repeated to form a plurality of wire interconnect structures.

21. The method of claim 14 further comprising the step of using the wire interconnect structure to electrically connect the substrate with another, adjacent substrate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 22, 2015
From: COLOSIMO, THOMAS J., JR; BRUNNER, JON W.
To: KULICKE AND SOFFA INDUSTRIES, INC.
Reel/Frame 034789/0422 →
Continuity (2)
Provisional Application 61672449 · Jul 17, 2012
Related Publication 20150132888A1 · May 14, 2015