IP Library › Granted Patent US 9,505,624
Granted Patent B2
US 9,505,624 · App. 14/182,819 · Granted Nov 29, 2016

Metal-free CVD coating of graphene on glass and other dielectric substrates

Inventors: Xinyuan Liu (Corning, NY); Robert George Manley (Vestal, NY); Robert Michael Morena (Lindley, NY); Zhen Song (Painted Post, NY)
Assignee: Corning Incorporated
C01B31/0453C01B31/0438Y10T428/24975Y10T428/25Y10T428/265Y10T428/30
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Quick Facts
Patent No.
US 9,505,624
App. No.
14/182,819
Granted
Nov 29, 2016
Kind
B2
Abstract

A catalyst-free CVD method for forming graphene. The method involves placing a substrate within a reaction chamber, heating the substrate to a temperature between 600° C. and 1100° C., and introducing a carbon precursor into the chamber to form a graphene layer on a surface of the substrate. The method does not use plasma or a metal catalyst to form the graphene.

Claims (16)

1. A method for forming graphene, comprising:

placing a substrate within a reaction chamber;

heating the substrate to a temperature between 600° C. and 1100° C.;

introducing a carbon precursor into the chamber and forming a graphene layer on a surface of the substrate, wherein the substrate is free of a metal catalyst and the chamber is free of plasma during the forming, wherein the substrate comprises glass or glass-ceramic.

2. The method according to claim 1 , wherein the substrate is a honeycomb substrate.

3. The method according to claim 1 , wherein the substrate is heated to a temperature between 700° C. and 1000° C.

4. The method according to claim 1 , wherein the carbon precursor is selected from the group consisting of acetylene, ethylene and methane.

5. The method according to claim 1 , wherein the chamber pressure is from 0.001 to 760 Torr.

6. The method according to claim 1 , wherein the graphene layer thickness is from 0.34 to 100 nm.

7. The method according to claim 1 , wherein the reaction chamber is free of hydrogen gas during the forming.

8. The method according to claim 1 , further comprising heating the graphene layer in vacuum without exposure to the carbon precursor.

9. The method according to claim 8 , wherein a metal catalyst is placed proximate to the graphene layer.

10. A method for forming graphene, comprising:

placing a honeycomb substrate within a reaction chamber;

heating the honeycomb substrate to a temperature between 600° C. and 1100° C.;

introducing a carbon precursor into the chamber and forming a graphene layer on a surface of the honeycomb substrate, wherein the honeycomb substrate is free of a metal catalyst and the chamber is free of plasma during the forming.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2014
From: LIU, XINYUAN; MANLEY, ROBERT GEORGE; MORENA, ROBERT MICHAEL; SONG, ZHEN
To: CORNING INCORPORATED
Reel/Frame 032235/0961 →
Continuity (1)
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