IP Library › Granted Patent US 9,514,854
Granted Patent B2
US 9,514,854 · App. 13/963,928 · Granted Dec 6, 2016

X-ray radiation passage window for a radiation detector

Inventors: Andreas Pahlke (Munich, DE); Reinhard Fojt (Berg, DE); Natsuki Miyakawa (Munich, DE)
Assignee: KETEK GmbH
G21K1/00H01J5/18H01J35/18H01J2235/18H01J2235/183
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Quick Facts
Patent No.
US 9,514,854
App. No.
13/963,928
Granted
Dec 6, 2016
Kind
B2
Abstract

An X-ray radiation passage window can be used for a radiation detector. The X-ray radiation passage window for a radiation detector includes a radiation-transmissive window element. The radiation-transmissive window element contains graphene. Furthermore, a radiation detector including an X-ray radiation passage window, a method for producing an X-ray radiation passage window and a use of graphene are disclosed.

Claims (34)

1. An X-ray radiation passage window comprising a radiation-transmissive window element, wherein the radiation-transmissive window element has a graphene-containing layer and the graphene-containing layer comprises a graphene multilayer construction, wherein the graphene-containing layer comprises at least 350 graphene monolayers, and wherein the graphene-containing layer has a thickness of less than 2.2 μm.

2. The X-ray radiation passage window according to claim 1 , wherein the graphene-containing layer has a layer thickness of greater than or equal to 100 nm.

3. The X-ray radiation passage window according to claim 1 , wherein the radiation-transmissive window element further comprises a layer that blocks visible light in addition to the graphene-containing layer.

4. The X-ray radiation passage window according to claim 3 , wherein the layer that blocks visible light contains aluminum.

5. The X-ray radiation passage window according to claim 1 , wherein the radiation-transmissive window element further comprises a passivation layer in addition to the graphene-containing layer.

6. The X-ray radiation passage window according to claim 5 , wherein the passivation layer contains boron nitride.

7. The X-ray radiation passage window according to claim 1 , further comprising a window holder element, wherein the radiation-transmissive window element is directly connected to the window holder element.

8. The X-ray radiation passage window according to claim 7 , wherein the graphene-containing layer is directly connected to the window holder element.

9. The X-ray radiation passage window according to claim 7 , wherein the window holder element has a melting temperature of greater than or equal to 1,000° C.

10. The X-ray radiation passage window according to claim 7 , wherein the window holder element contains at least one material selected from the group consisting of Si, SiO 2 , quartz, Si 2 N 4 , SiC, Al 2 O 3 , AlN, Cu, Ni, Mo, and W.

11. The X-ray radiation passage window according to claim 7 , wherein the window holder element is embodied as a cap comprising a metal or a ceramic.

12. A radiation detector comprising:

a detector housing;

an X-ray radiation passage window according to claim 1 ; and

a detector element arranged in the detector housing and configured to detect X-ray radiation.

13. The X-ray radiation passage window according to claim 1 , wherein the X-ray radiation passage window is a window for a radiation detector.

14. The X-ray radiation passage window according to claim 1 , further comprising a window holder element, wherein the graphene-containing layer is connected to the window holder element, and wherein the window holder element contains:

one material selected from the group consisting of Si, SiO 2 , quartz, Si 2 N 4 , SiC, Al 2 O 3 , AlN, Cu, Ni, Mo, and W;

one or a plurality of materials which are compatible with a process in which graphene is deposited onto the one or onto the plurality of said materials; and/or

at least one carbide-forming material.

15. A method for producing an X-ray radiation passage window, the method comprising forming a radiation-transmissive window element, wherein forming the radiation-transmissive window element comprises:

providing a substrate;

depositing a graphene-containing layer over the substrate; and

removing a portion of the substrate, wherein the graphene-containing layer comprises a graphene multilayer construction including at least 350 graphene monolayers, and wherein the graphene-containing layer has a thickness of less than 2.2 μm.

16. The method according to claim 15 , wherein the graphene-containing layer has a layer thickness of greater than or equal to 100 nm.

17. The method according to claim 15 , wherein, before removing the portion of the substrate, the method further comprises applying supporting structures on a side of the graphene-containing layer that faces away from the substrate.

18. The method according to claim 15 , further comprising forming supporting structures while removing the portion of the substrate.

19. The method according to claim 15 , wherein the substrate is structured before the graphene-containing layer is deposited.

20. An X-ray radiation passage window comprising a radiation-transmissive window element, wherein the radiation-transmissive window element has a graphene-containing layer, wherein the graphene-containing layer comprises a graphene multilayer construction including at least 350 graphene monolayers, wherein a supporting structure is formed within the graphene-containing layer such that the graphene-containing layer comprises depressions and regions between depressions, and wherein the graphene-containing layer has a thickness of less than 2.2 μm.

21. An X-ray radiation passage window comprising a radiation-transmissive window element, wherein the radiation-transmissive window element has a graphene-containing layer, wherein the graphene-containing layer comprises a graphene multilayer construction including at least 350 graphene monolayers, wherein the X-ray radiation passage window further comprises a window holder element, wherein the graphene-containing layer is directly connected to the window holder element, wherein the graphene-containing layer has a thickness of less than 2.2 μm, and wherein the window holder element contains:

one material selected from the group consisting of Si, SiO 2 , quartz, Si 2 N 4 , SiC, Al 2 O 3 , AlN, Cu, Ni, Mo, and W,

one or a plurality of materials which are compatible with a process in which graphene is deposited onto the one or onto the plurality of said materials, and/or

at least one carbide-forming material.

22. An X-ray radiation passage window comprising a radiation-transmissive window element, wherein the radiation-transmissive window element has a graphene-containing layer, wherein the graphene-containing layer consists of a plurality of graphene layers arranged on one another, wherein the graphene-containing layer comprises at least 350 graphene monolayers, wherein the graphene-containing layer is mechanically stable under pressure differences greater than 1 bar, and wherein the graphene-containing layer has a thickness of less than 2.2 μm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 29, 2013
From: PAHLKE, ANDREAS; FOJT, REINHARD; MIYAKAWA, NATSUKI
To: KETEK GMBH
Reel/Frame 031504/0179 →
Priority Claims (1)
DE 10 2012 107 342 · Aug 9, 2012 · national
Continuity (1)
Related Publication 20140044240A1 · Feb 13, 2014