IP Library Granted Patent US 9,529,099
Granted Patent B2
US 9,529,099 · App. 14/080,218 · Granted Dec 27, 2016

Microcavity plasma panel radiation detector

Inventors: Peter S. Friedman (Toledo, OH); Daniel S. Levin (Ann Arbor, MI)
Assignees: Integrated Sensors, LLC; University of Michigan
G01T1/2935H01J47/002G01T1/185G01T1/2921H01J47/02
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Quick Facts
Patent No.
US 9,529,099
App. No.
14/080,218
Granted
Dec 27, 2016
Kind
B2
Abstract

A position-sensitive ionizing-radiation counting detector includes a first substrate and a second substrate, and a defined gas gap between the first substrate and the second substrate. The first and second substrates comprise dielectrics and a discharge gas is contained between the first and second substrate. A microcavity structure comprising microcavities is coupled to the second substrate. An anode electrode is coupled to the first substrate and a cathode electrode is coupled to the microcavity structure on the second substrate. The detector further includes pixels defined by a microcavity and an anode electrode coupled to a cathode electrode, and a resistor coupled to each of the cathode electrodes. Each pixel may output a gas discharge counting event pulse upon interaction with ionizing-radiation. The detector further includes a voltage bus coupled to each of the resistors and a power supply coupled to at least one of the electrodes.

Claims (62)

1. A position-sensitive ionizing-radiation counting detector comprising:

a first substrate;

a second substrate coupled to the first substrate and defining a gas gap between the first substrate and the second substrate, wherein the first and second substrates comprise dielectrics;

a discharge gas contained between the first and second substrate;

at least one microcavity coupled to the second substrate;

at least one anode electrode coupled to the first substrate;

at least one cathode electrode coupled to the microcavity on the second substrate;

a plurality of pixels, wherein each pixel is defined by a microcavity and an anode electrode coupled to a cathode electrode and each pixel is capable of generating a gas discharge counting event pulse upon interaction with ionizing-radiation;

a resistor coupled to each of the cathode electrodes;

a voltage bus coupled to each of the resistors;

a power supply coupled to at least one of the electrodes;

a discharge event detector coupled to at least one of the electrodes for detecting a gas discharge counting event in the electrode;

circuitry for detecting if a gas discharge counting event pulse is output from the pixels, and for counting each such gas discharge pulse as an individual event and having an approximately equal value;

wherein an amount of detected radiation is based on a total count of individual events.

2. The radiation detector of claim 1 , further comprising a hermetic seal coupled between the first substrate and the second substrate.

3. The radiation detector of claim 1 , wherein each of the cathode electrodes comprise metallized inner walls of the microcavity.

4. The radiation detector of claim 3 , wherein each microcavity comprises a conductive via electrically coupling a cavity cathode on one side of the second substrate to the resistor on the other side of the second substrate.

5. The radiation detector of claim 4 , wherein the resistor comprises a thick-film printed resistor.

6. The radiation detector of claim 4 , wherein the resistor comprises a surface mount resistor.

7. The radiation detector of claim 4 , wherein a conductive via plug electrically couples a microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

8. The radiation detector of claim 3 , wherein each microcavity comprises a resistive via plug electrically coupling a microcavity cathode on one side of the second substrate to a voltage bus bar on other side of the second substrate.

9. The radiation detector of claim 8 , wherein a conductive via plug electrically couples the microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

10. The radiation detector of claim 1 , further comprising:

a gas evacuation and gas fill channel;

a gas tube hole;

a hermetic seal groove; and

alignment holes.

11. A position-sensitive ionizing-radiation counting detector comprising:

a first substrate;

a second substrate coupled to the first substrate and defining a gas gap between the first substrate and the second substrate, wherein both substrates are dielectrics;

a discharge gas contained between the first and second substrate;

at least one microcavity coupled to the second substrate;

at least one anode electrode coupled to the first substrate;

at least one cathode electrode coupled to the microcavity on the second substrate, wherein each cathode electrode comprises a metallization layer over the inner walls of the microcavity;

a plurality of pixels, wherein each pixel is defined by a microcavity and an anode electrode coupled to a cathode electrode and each pixel is capable of generating a gas discharge counting event pulse upon interaction with ionizing-radiation;

a via plug going from the microcavity on one side of the second substrate to the other side of the second substrate;

a resistor coupled to each of the cathode electrodes;

a voltage bus coupled to each of the resistors;

a power supply coupled to at least one of the electrodes;

a discharge event detector coupled to at least one of the electrodes for detecting a gas discharge counting event in the electrode;

circuitry for detecting if a gas discharge counting event pulse is output from the pixels, and for counting each such gas discharge pulse as an individual event and having an approximately equal value;

wherein an amount of detected radiation is based on a total count of individual events.

12. The radiation detector of claim 11 , wherein the via plug is a thick-film conductor connecting the resistor to the microcavity.

13. The radiation detector of claim 12 , wherein a conductive via plug electrically couples the microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

14. The radiation detector of claim 13 , further comprising:

a gas evacuation and gas fill channel;

a gas tube hole;

a hermetic seal groove; and

alignment holes.

15. The radiation detector of claim 11 , wherein the via plug is a thick-film resistor coupling the microcavity to a voltage bus bar.

16. The radiation detector of claim 15 , wherein a conductive via plug electrically couples the microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

17. The radiation detector of claim 11 , further comprising a hermetic seal coupled between the first substrate and the second substrate.

18. The radiation detector of claim 17 , wherein a conductive via plug electrically couples the microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

19. The radiation detector of claim 11 , wherein a conductive via plug electrically couples the microcavity anode on one side of the first substrate to a sense line on the other side of the first substrate.

20. A method of detecting ionizing-radiation based on a counting of gas discharge events, the method comprising:

receiving ionizing-radiation at a first substrate of a plasma panel, the plasma panel having a second substrate and at least one microcavity coupled to the second substrate;

creating at least one ion-pair in a gas contained within a microcavity gas gap between the first and second substrates;

causing a gas-discharge event at a pixel site of the plasma panel, each pixel site defined by a microcavity having an anode and cathode and quench resistor, wherein the event is isolated and formed in a microcavity; and

counting a plurality of the gas-discharge events at a pulse detector coupled to either the anode or the cathode, wherein each of the gas-discharge events is counted as approximately an equal value;

wherein the anode is coupled to the first substrate and the cathode is coupled to the microcavity;

wherein each pixel site is capable of generating the gas-discharge counting event pulse upon interaction with ionizing-radiation;

wherein the quench resistor coupled to the cathode and a voltage bus is coupled to the quench resistor and a power supply is coupled to at least one cathode or anode.

Assignments (4)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME AND ADDRESS PREVIOUSLY RECORDED ON REEL 032601 FRAME 0752. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2017
From: LEVIN, DANIEL S.
To: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
Reel/Frame 043027/0271 →
CONFIRMATORY LICENSE Recorded Jun 2, 2015
From: INTEGRATED SENSORS, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 035814/0721 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2014
From: LEVIN, DANIEL S.
To: UNIVERSITY OF MICHIGAN
Reel/Frame 032601/0752 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2014
From: FRIEDMAN, PETER S.
To: INTEGRATED SENSORS, LLC
Reel/Frame 032601/0813 →
Continuity (3)
Provisional Application 61796549 · Nov 14, 2012
Provisional Application 61852346 · Mar 15, 2013
Related Publication 20150001411A1 · Jan 1, 2015