Current-perpendicular-to-plane magneto-resistance effect element
The CPPGMR element of the present invention has an orientation layer 12 formed on a substrate 11 to texture a Heusler alloy into a (100) direction, an underlying layer 13 that is an electrode for magneto-resistance measurement stacked on the orientation layer 12 , a lower ferromagnetic layer 14 and an upper ferromagnetic layer 16 each stacked on the underlying layer 13 and made of a Heusler alloy, a spacer layer 15 sandwiched between the lower ferromagnetic layers 14 and the upper ferromagnetic layers 16 , and a cap layer 17 stacked on the upper ferromagnetic layer 16 for surface-protection. This manner makes it possible to provide, inexpensively, an element using a current-perpendicular-to-plane giant magneto-resistance effect (CPPGMR) of a thin film having a trilayered structure of a ferromagnetic metal/a nonmagnetic metal/a ferromagnetic metal, thereby showing excellent performances.
1. A current-perpendicular-to-plane magneto-resistance effect element comprising:
a substrate comprising at least one of a surface-oxidized Si substrate, a silicon substrate, a glass substrate, and a metal substrate;
an orientation layer formed on the substrate to texture Heusler alloy into a (100) direction;
a lower ferromagnetic layer and an upper ferromagnetic layer that each comprises a polycrystalline thin film of a Heusler alloy texture into a (100) direction, and that are each formed on the orientation layer; and
a spacer layer sandwiched between the lower ferromagnetic layer and the upper ferromagnetic layer,
wherein the orientation layer comprises at least one of MgO, TiN, and NiTa alloys, and
wherein the lower ferromagnetic layer and the upper ferromagnetic layer are each a polycrystalline thin film comprising a Heusler alloy represented by a composition formula of Co 2 AB wherein A is Cr, Mn, or Fe, or a mixture obtained by mixing two or more of these elements with each other to set the total quantity of the mixed elements to 1, and B is Al, Si, Ga, Ge, In, or Sn, or a mixture obtained by mixing two or more of these elements with each other to set the total quantity of the mixed elements to 1.
2. The current-perpendicular-to-plane magneto-resistance effect element according to claim 1 , wherein the spacer layer is at least one metal selected from the group consisting of Ag, Al, Cu, Au, and Cr, or any alloys of the selected metal(s).
3. The current-perpendicular-to-plane magneto-resistance effect element according to claim 1 , wherein at least one of the orientation layer, the lower ferromagnetic layer, the upper ferromagnetic layer, and the spacer layer is formed by a sputtering method.
4. The current-perpendicular-to-plane magneto-resistance effect element according to claim 1 , wherein an underlying layer that is an electrode for magneto-resistance measurement is laid to be sandwiched between the orientation layer and the lower ferromagnetic layer.
5. The current-perpendicular-to-plane magneto-resistance effect element according to claim 4 , wherein the underlying layer comprises a metal or an alloy.
6. The current-perpendicular-to-plane magneto-resistance effect element according to claim 1 , further comprising a cap layer stacked on the upper ferromagnetic layer for surface-protection.
7. The current-perpendicular-to-plane magneto-resistance effect element according to claim 6 , wherein the cap layer comprises at least one metal selected from the group consisting of Ag, Al, Cu, Au, Ru, and Pt, or any alloys of the selected metal(s).