Organic light emitting display device and manufacturing method thereof
A method of fabricating an organic light emitting display device is discussed. The method in one example includes: sequentially forming a first metal film and a second metal film on a substrate and performing a mask procedure for the first and second metal films, to form a gate electrode, a first storage electrode and a pad in a thin film transistor region, a storage capacitor region and a pad region; forming a gate insulation film on the substrate provided with the gate electrode; forming a third storage electrode which overlaps the second storage electrode with a passivation film therebetween and is connected to the drain electrode; forming red, green and blue color filters in respective pixel regions of the substrate; and forming an organic light emitting diode on the substrate provided with the color filter.
1. An organic light emitting display device comprising:
an electrode pattern on a substrate;
a barrier layer on the electrode pattern;
an insulation film on the substrate and covering the barrier layer and having a contact hole on the barrier layer, wherein the barrier layer is formed from a conductive oxide, and
wherein the conductive oxide is one of indium gallium zinc oxide (IGZO), zinc oxide (ZnO) and titanium oxide (TiO);
a channel layer on the insulation film;
an etch stopper on the channel layer;
a drain electrode configured to contact one end of the channel layer and one end of the etch stopper; and
an organic light emitting diode which is disposed over the substrate and includes a first electrode electrically connected to the drain electrode, an organic emission layer formed on the first electrode and a second electrode on the organic emission layer.
2. The organic light emitting display device of claim 1 , wherein the electrode pattern includes at least two metal layers.
3. The organic light emitting display device of claim 2 , wherein the at least two metal layers are each formed from one of a molybdenum-titanium alloy MoTi, aluminum Al, an aluminum alloy, tungsten W, copper Cu, nickel Ni, chromium Cr, molybdenum Mo, titanium Ti, platinum Pt and tantalum Ta.
4. An organic light emitting display device comprising:
a gate electrode, a first storage electrode and a pad which are disposed on a substrate corresponding to a thin film transistor region, a storage capacitor region and a pad region, respectively;
barrier layers on the gate electrode, the first storage electrode and the pad;
a gate insulation film on the substrate provided with the barrier layers;
a channel layer on the gate insulation film opposite to the gate electrode;
an etch stopper on the channel layer;
a source electrode configured to contact one end of the channel layer and one end of the etch stopper;
a drain electrode separated from the source electrode, connected to the first storage electrode through the gate insulation film and configured to contact other ends of the channel layer and the etch stopper;
a first connective portion connected to a barrier layer on the gate electrode through the gate insulation film;
a second storage electrode on the gate insulation film opposite to the first storage electrode;
a first pad contact layer connected to the pad through the gate insulation film;
a passivation film on the substrate provided with the first connective portion, the source and drain electrodes, the second storage electrode and the first pad contact layer;
a second connective portion connected to the first connective portion through the passivation film;
a third storage electrode connected to the drain electrode through the passivation film and overlapping the second storage electrode;
a second pad contact layer connected to the first pad contact layer through the passivation film;
a color filter in a pixel region of the substrate provided with the second connective portion, the third storage electrode and the second pad contact layer; and
an organic light emitting diode on the substrate provided with the color filter and includes a first electrode electrically connected to the third storage electrode, an organic emission layer on the first electrode and a second electrode on the organic emission layer.
5. The organic light emitting display device of claim 4 , wherein the barrier layers are formed from a conductive oxide.
6. The organic light emitting display device of claim 5 , wherein the conductive oxide is one of indium gallium zinc oxide IGZO, zinc oxide ZnO and titanium oxide TiO.
7. The organic light emitting display device of claim 4 , wherein the gate electrode includes at least two metal layers.
8. The organic light emitting display device of claim 4 , wherein gate electrode is formed in a single layer which is formed from one of an alloy of molybdenum and titanium MoTi, aluminum Al, an aluminum alloy, tungsten W, copper Cu, nickel Ni, chromium Cr, molybdenum Mo, titanium Ti, platinum Pt and tantalum Ta.
9. The organic light emitting display device of claim 4 , wherein the gate electrode is formed in a double layered structure configured with stacked metal layers which are each formed from one of a molybdenum-titanium alloy MoTi, aluminum Al, an aluminum alloy, tungsten W, copper Cu, nickel Ni, chromium Cr, molybdenum Mo, titanium Ti, platinum Pt and tantalum Ta.
10. The organic light emitting display device of claim 4 , the etch stopper is hardened through a heat treatment process before the source and drain electrodes are formed.
11. The organic light emitting display device of claim 4 , wherein the etch stopper is hardened through a heat treatment process after the etch stopper is formed.
12. The organic light emitting display device of claim 4 , wherein the first electrode is a cathode electrode and the organic light emitting display device is a bottom emission mode organic light emitting display device.