IP Library › Granted Patent US 9,564,579
Granted Patent B2
US 9,564,579 · App. 14/115,105 · Granted Feb 7, 2017

Graphene magnetic tunnel junction spin filters and methods of making

Inventors: Jeffry Kelber (Denton, TX); Mi Zhou (Denton, TX)
Assignee: UNIVERSITY OF NORTH TEXAS
H01L43/08C01B31/0446H01L21/0237H01L43/10H01L43/12C01B2204/04H01L27/222
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Quick Facts
Patent No.
US 9,564,579
App. No.
14/115,105
Granted
Feb 7, 2017
Kind
B2
Abstract

A Tunnel Magnetic Junction of high magnetoresistance is prepared at temperatures and pressure consistent with Si CMOS fabrication and operation. A first metal layer of cobalt or nickel is grown on an interconnect or conductive array line of e.g., copper. The metal layer is formed by electron beam irradiation. Annealing at UHV at temperatures below 700K yields a carbon segregation that forms a few layer thick (average density 3.5 ML) graphene film on the metal layer. Formation of a second layer of metal on top of the graphene barrier layer yields a high performance MTJ.

Claims (5)

1. A magnetic tunnel junction (MTJ) of high tunneling magnetoresistance (TMR) in excess of 250%, comprising a first ferromagnetic metal layer, a few molecule layer film of graphene on said first ferromagnetic metal layer, and a second ferromagnetic metal layer on said graphene film.

2. The MTJ of claim 1 , wherein said TMR value is in excess of 1,000%, and said first and second ferromagnetic metal layers are comprised of cobalt or nickel.

3. The MTJ of claim 1 , wherein said MTJ is formed on a conductive interconnect of a Si CMOS device.

4. The MTJ of claim 1 , wherein said first and second ferromagnetic metal layers are in parallel ferromagnetic orientation with respect to each other.

5. The MTJ of claim 1 , wherein said first and second ferromagnetic metal layers are in antiparallel ferromagnetic orientation with respect to each other.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2014
From: KELBER, JEFFRY; ZHOU, MI
To: UNIVERSITY OF NORTH TEXAS
Reel/Frame 032254/0914 →
Continuity (2)
Provisional Application 61490650 · May 27, 2011
Related Publication 20140151826A1 · Jun 5, 2014