Semiconductor device and semiconductor package
A semiconductor device includes a first semiconductor region of a first conductive type, a second semiconductor region of a second conductive type, a first electrode, a third semiconductor region of the second conductive type, a fourth semiconductor region of the first conductive type, and a conductive portion. The second semiconductor region is provided on the first semiconductor region. The first electrode is provided on the second semiconductor region. The third semiconductor region is provided on the first electrode. The fourth semiconductor region is provided on the third semiconductor region. The conductive portion is surrounded by the third semiconductor region and an intervening insulation portion and is electrically connected to the first electrode.
1. A semiconductor device comprising:
a first semiconductor region of a first conductivity type;
a second semiconductor region of a second conductivity type on the first semiconductor region;
a first electrode on the second semiconductor region;
a third semiconductor region of the second conductivity type on the first electrode;
a fourth semiconductor region of the first conductivity type on the third semiconductor region; and
a conductive portion extending through the third semiconductor region and an insulation portion located between the conductive portion and the third semiconductor region, wherein the conductive portion is electrically connected to the first electrode.
2. The device according to claim 1 , wherein the first electrode includes:
a first layer comprising at least one of gold, tin, and indium;
a second layer comprising at least one of titanium nitride or titanium tungsten between the first layer and the second semiconductor region; and
a third layer comprising at least one of titanium nitride or titanium tungsten between the first layer and the third semiconductor region.
3. The device according to claim 1 , further comprising:
a second electrode on the conductive portion and electrically connected thereto;
a third electrode below the first semiconductor region and electrically connected to the first semiconductor region; and
a fourth electrode on the fourth semiconductor region, spaced from the second electrode, and electrically connected to the fourth semiconductor region.
4. The device according to claim 3 , wherein the first semiconductor region comprises a first layer extending inwardly of the second semiconductor region.
5. The device according to claim 4 , wherein the first semiconductor region comprises a second layer extending inwardly of the first layer, and the second layer has a higher dopant concentration than the first layer.
6. The device according to claim 5 , wherein the second layer contacts the third electrode and extends between the third electrode and the first layer.
7. The device according to claim 3 , wherein the fourth semiconductor region comprises a first layer extending inwardly of the third semiconductor region.
8. The device according to claim 7 , wherein the fourth semiconductor region comprises a second layer extending inwardly of the first layer, and the second layer has a higher dopant concentration than the first layer.
9. The device according to claim 8 , wherein the second layer contacts the fourth electrode and extends between the fourth electrode and the first layer.
10. The device according to claim 1 , wherein the first and second semiconductor regions and the first electrode make up a first device element, and the third and fourth semiconductor regions and the first electrode make up a second device element, such that the first and second device elements share the first electrode.
11. The device according to claim 1 , further comprising:
a fifth semiconductor region of the second conductivity type selectively located on the fourth semiconductor region;
a gate electrode; and
a gate insulation layer between at least the gate electrode and the fourth semiconductor region.
12. The device according to claim 11 , further comprising:
a second electrode on the conductive portion and electrically connected to the conductive portion;
a third electrode below the first semiconductor region and electrically connected to the first semiconductor region;
a fourth electrode on the fourth semiconductor region, spaced from the second electrode, and electrically connected to the fourth semiconductor region; and
a fifth electrode on the fourth semiconductor region, spaced from the second electrode and the fourth electrode, and electrically connected to the gate electrode.
13. The device according to claim 12 , further comprising:
a sixth semiconductor region of the first conductivity type between the first electrode and the third semiconductor region.