Metal base substrate, power module, and method for manufacturing metal base substrate
A metal base substrate of the present invention includes a copper plate made of copper, a metal layer that is formed on the copper plate and is made of a metal different from the copper, an insulating resin sheet that is formed by bonding a sheet made of an insulating resin onto the metal layer, and a circuit pattern formed on the insulating resin sheet.
1. A metal base substrate, comprising:
a substrate made of copper;
a first metal layer that is formed on said substrate and is made of a metal different from said copper;
an insulating resin sheet that is formed by bonding a sheet made of an insulating resin onto said first metal layer; and
a circuit pattern formed on said insulating resin sheet, wherein
said circuit pattern is made of copper,
the metal base substrate further comprising a third metal layer made of the same metal as said metal between said insulating resin sheet and said circuit pattern.
2. The metal base substrate according to claim 1 , wherein said first metal layer has a surface roughened on said insulating resin sheet side.
3. The metal base substrate according to claim 1 , wherein said metal is aluminum or an aluminum alloy.
4. The metal base substrate according to claim 1 , wherein said insulating resin sheet is made of an epoxy resin.
5. A power module, comprising:
the metal base substrate according to claim 1 ;
a case having said metal base substrate as a lower surface;
a terminal having one end electrically connected to a semiconductor chip mounted on said circuit pattern of said metal base substrate; and
a resin that fills said case so as to expose at least the other end of said terminal.
6. The power module according to claim 5 , wherein said resin includes a gel silicone resin.
7. The power module according to claim 5 , wherein said resin includes a solid epoxy resin.
8. The power module according to claim 5 , wherein said semiconductor chip and said terminal are connected with a wire formed by wire bonding.
9. The power module according to claim 5 , wherein said semiconductor chip and said terminal are connected with a terminal different from said terminal.
10. The power module according to claim 5 , wherein said semiconductor chip is any of Si, SiC, and GaN.
11. A power module, comprising:
the metal base substrate according to claim 1 ;
a terminal having one end electrically connected to a semiconductor chip mounted on said circuit pattern of said metal base substrate; and
a sealing resin that seals said metal base substrate, said semiconductor chip, and said terminal so as to expose at least the other end of said terminal.
12. The power module according to claim 11 , wherein said sealing resin includes an epoxy resin.
13. The power module according to claim 11 , wherein said semiconductor chip and said terminal are connected with a wire formed by wire bonding.
14. The power module according to claim 11 , wherein said semiconductor chip and said terminal are connected with a terminal different from said terminal.
15. The power module according to claim 11 , wherein said semiconductor chip is any of Si, SiC, and GaN.
16. The metal base substrate according to claim 1 , further comprising
a second metal layer that is formed on a surface of said substrate opposite to said first metal layer and is made of the same metal as said metal.
17. A method for manufacturing a metal base substrate, comprising the steps of:
(a) preparing a substrate made of copper;
(b) forming a first metal layer made of a metal different from said copper on said substrate;
(c) providing a sheet made of a solid insulating resin and forming an insulating resin sheet by bonding the sheet made of the solid insulating resin onto said first metal layer; and
(d) forming a circuit pattern on said insulating resin sheet.
18. The method for manufacturing a metal base substrate according to claim 17 , wherein said step (b) includes the step of roughening a surface of said first metal layer on a side on which said insulating resin sheet is to be formed.
19. The method for manufacturing a metal base substrate according to claim 17 , further comprising the step of (e) forming a second metal layer made of the same metal as said metal on a surface of said substrate opposite to said first metal layer.
20. The method for manufacturing a metal base substrate according to claim 17 , wherein said circuit pattern is made of copper in said step (d),
the method further comprising the step of (f) forming a third metal layer made of the same metal as said metal on said insulating resin sheet between said step (c) and said step (d).