Interconnects through dielecric vias
A dielectric layer includes a reflow via. The reflow via is formed by reflow of the dielectric layer. An interconnect is in contact through the reflow via.
1. An apparatus comprising:
a first metal layer;
a dielectric layer disposed on the first metal layer, wherein the dielectric layer includes a reflow via, formed by reflow of the dielectric layer;
an interconnect in contact with the first metal layer through the reflow via; and
a substrate including a containment region to contain reflow of the dielectric layer.
2. The apparatus of claim 1 , wherein the dielectric layer includes a first region and a second region, wherein the first region is geometrically distinct from and larger in surface area than the second region, and wherein the reflow via is formed in the first region based on an increased rate of etch of the first region compared to the second region.
3. The apparatus of claim 1 , further comprising a raised feature disposed on the first metal layer; wherein the reflow via is disposed on the raised feature.
4. The apparatus of claim 3 , wherein the dielectric layer is reflowable upon reaching a glass transition temperature (Tg).
5. The apparatus of claim 3 , wherein the raised feature is a dome.
6. The apparatus of claim 1 , wherein the dielectric layer is electrodepositable based on an electrophoretic effect to cause the dielectric layer to attach to metal.
7. The apparatus of claim 1 , the substrate including a plurality of levels to receive the first metal layer, the dielectric layer, and the interconnect, wherein the interconnect spans across the plurality of levels.
8. The apparatus of claim 7 , wherein the plurality of levels is provided as a three dimensional patterned structure that is formable self-aligned in the substrate.
9. The apparatus of claim 1 , wherein the interconnect is formed by a second metal layer, and the apparatus further comprises a crossover formed by the second metal layer disposed on the dielectric layer to provide an electrical conduction path across the dielectric layer.
10. An apparatus comprising:
a raised feature;
a dielectric layer disposed on the raised feature;
a reflow via disposed in the dielectric layer at the raised feature, the reflow via formed by reflow of the dielectric layer;
an interconnect in contact with the raised feature through the reflow via; and
a substrate including a containment region to contain reflow of the dielectric layer.
11. The apparatus of claim 10 , further comprising a first metal layer, wherein the raised feature is disposed on the first metal layer.
12. The apparatus of claim 10 , further comprising a second metal layer disposed on the dielectric layer, wherein the interconnect is formed from the second metal layer.
13. A method, comprising:
forming a dielectric layer on a first metal layer;
reflowing the dielectric layer to form a reflow via;
forming an interconnect with the first metal layer at the reflow via; and
forming a substrate including a containment region to contain reflow of the dielectric layer.
14. The method of claim 13 , wherein reflowing the dielectric layer comprises heating the dielectric layer at or above a glass transition temperature (Tg) during a baking process.