Silicon carbide semiconductor devices having nitrogen-doped interface
Methods, systems, and devices are disclosed for implementing high power circuits and semiconductor devices. In one aspect, a method for fabricating a silicon carbide semiconductor device includes forming a thin epitaxial layer of a nitrogen doped SiC material on a SiC epitaxial layer formed on a SiC substrate, and thermally growing an oxide layer to form an insulator material on the nitrogen doped SiC epitaxial layer, in which the thermally grown oxide layer results in at least partially consuming the nitrogen doped SiC epitaxial layer in the oxide layer to produce an interface including nitrogen between the SiC epitaxial layer and the oxide layer.
1. A SiC device, comprising:
a SiC substrate;
a first n-type SiC epitaxial layer formed on the SiC substrate;
a second n-type SiC epitaxial layer comprising nitrogen dopant formed on the first n-type SiC epitaxial layer;
an oxide insulator material layer disposed over the second n-type SiC epitaxial layer,
an interface layer disposed in the oxide insulator material layer, the interface layer comprising the nitrogen dopant; and
one or more transistor structures over the oxide layer,
wherein the interface layer comprises a spatial variation of nitrogen dopant concentration that decreases in distance from the second n-type SiC epitaxial layer below the interface layer to the oxide insulator material layer above the interface layer.
2. The device as in claim 1 , wherein the insulator material includes silicon dioxide.
3. The device as in claim 1 , wherein the interface layer comprises at least a portion of the second n-type SiC epitaxial layer material.
4. The device as in claim 1 , wherein the second n-type SiC epitaxial layer has a thickness less than 500 nm.
5. The device as in claim 1 , wherein the second n-type SiC material has a carrier concentration greater than 1×10 18 cm −3 .
6. The device of claim 1 , wherein the one or more transistor structures includes a gate contact formed over the oxide insulator material layer.
7. The device of claim 1 , wherein the SiC substrate is formed over a drain contact.
8. The device of claim 1 , wherein the first n-type SiC epitaxial layer includes a first conductivity type region and a second conductivity type region formed over the first conductivity type region.
9. The device of claim 1 , wherein the interface layer disposed in the oxide insulator material layer increases carrier mobility in the device as compared with a device without the interface.
10. The device of claim 1 , further comprising an n+ layer formed on a p-type well region formed on the first n-type SiC epitaxial layer.
11. A SiC device, comprising:
a SiC substrate;
a first n-type SiC epitaxial layer formed on the SiC substrate;
an oxide layer of an insulator material formed on the first n-type SiC epitaxial layer, the oxide layer including a surface layer including nitrogen dopant that forms an interface with the first n-type SiC epitaxial layer;
a residual layer formed of a second n-type SiC epitaxial layer between the first n-type SiC epitaxial layer and the surface layer of the oxide layer, wherein the residual layer comprises the nitrogen dopant; and
one or more transistor structures over the oxide layer,
wherein the interface layer comprises a spatial variation of nitrogen dopant concentration that decreases in distance from the second n-type SiC epitaxial layer below the interface layer to the oxide insulator material layer above the interface layer.
12. The device as in claim 11 , wherein the insulator material includes silicon dioxide.
13. The device as in claim 11 , wherein the second n-type SiC epitaxial layer has a thickness less than 500 nm.
14. The device as in claim 11 , wherein the second n-type SiC material has a carrier concentration greater than 1×10 18 cm −3 .
15. The device of claim 11 , wherein the one or more transistor structures includes a gate contact formed over the oxide layer.
16. The device of claim 11 , wherein the SiC substrate is formed over a drain contact.
17. The device of claim 11 , wherein the first n-type SiC epitaxial layer includes a first conductivity type region and a second conductivity type region formed over the first conductivity type region.
18. The device of claim 11 , wherein the interface disposed in the oxide insulator material layer increases carrier mobility in the device as compared with a device without the interface.
19. The device of claim 11 , further comprising an n+ layer formed on a p-type well region formed on the first n-type SiC epitaxial layer.