Process for forming metal film, and product equipped with metal film
The purpose of the present invention is to provide a wiring substrate from which a metal film cannot be detached easily. A process for forming a metal film comprises a step (X) of applying an agent containing a compound (α) onto the surface of a base and a step (Y) of forming a metal film on the surface of the compound (α) by a wet-mode plating technique, wherein the compound (α) is a compound having either an OH group or an OH-generating group, an azide group and a triazine ring per molecule, and the base comprises a polymer.
1. A product equipped with a metal film, the product comprising:
a base,
a compound (α) applied onto a surface of the base; and
a wet-type plating metal film formed on the compound (α),
wherein the compound (α) is a compound represented by the formula [I]:
wherein
E is N,
F is the OH group or the OH yielding group,
-Q is —N 3 or —NR 1 (R 2 ),
R 1 and R 2 of —NR 1 (R 2 ) are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,
R is a chain hydrocarbon group having a carbon number of 1 to 12,
R′ is a chain hydrocarbon group having a carbon number of 1 to 4,
A is H or a chain hydrocarbon group having a carbon number of 1 to 4, and
n is an integer of from 0 to 2; and
wherein the base comprises a polymer.
2. The product according to claim 1 , wherein the base and the compound (α) are chemically bonded to each other.
3. The product according to claim 1 , wherein the OH group or the OH yielding group is an alkoxysilyl group.
4. The product according to claim 1 , wherein the compound (α) is a compound represented by the formula [Io]:
wherein
-Q is —N 3 or —NR 1 (R 2 ),
R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,
R is a chain hydrocarbon group having a carbon number of 1 to 12,
R′ is a chain hydrocarbon group having a carbon number of 1 to 4,
A is H or a chain hydrocarbon group having a carbon number of 1 to 4,
n is an integer of from 0 to 2, and
at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .
5. The product according to claim 1 , wherein the compound (α) is a compound represented by the formula [Ia]:
wherein
R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,
R is a chain hydrocarbon group having a carbon number of 1 to 12,
R′ is a chain hydrocarbon group having a carbon number of 1 to 4,
A is H or a chain hydrocarbon group having a carbon number of 1 to 4,
n is an integer of from 0 to 2, and
at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .
6. The product according to claim 1 , wherein the compound (α) is a compound represented by the formula [Ib]:
wherein
R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,
R is a chain hydrocarbon group having a carbon number of 1 to 12,
R′ is a chain hydrocarbon group having a carbon number of 1 to 4,
A is H or a chain hydrocarbon group having a carbon number of 1 to 4,
n is an integer of from 0 to 2, and
at least one, out of all R 1 s and all R 2 s, is —RSi(R′) n (OA) 3−n .
7. The product according to claim 1 , wherein a substance represented by the formula [II]:
is applied onto the surface of the compound (α),
wherein
X′ and Y′ are each independently Si or Ti,
Z is Al,
G is a hydrocarbon group having a carbon number of 1 to 3, or an alkoxy group having a carbon number of 1 to 3,
B is an alkoxy group having a carbon number of 1 to 3,
n and m are each independently an integer of from 0 to 200,
2≦n+m≦400, and
p is an integer of from 0 to 100.
8. The product according to claim 1 , wherein a compound (β) comprising at least one group selected from the group consisting of an alkoxysilyl group, an alkoxy alminate group, and an alkoxy titanate group is applied onto the surface of the compound (α).
9. The product according to claim 8 , wherein the compound (β) is a compound represented by the formula [T]:
L-Si(M′) n (OM) 3−n , Formula [T]
wherein
L is an organic group,
M′ is a chain hydrocarbon group having a carbon number of 1 to 4,
M is H or a chain hydrocarbon group having a carbon number of 1 to 4,
n is an integer of from 0 to 2, and
M′ and M could be identical or could be different.
10. The product according to claim 8 , wherein the compound (β) is a compound represented by the formula [III]:
wherein
R 5 is a hydrocarbon group having a carbon number of 1 to 12,
R 6 is H or a hydrocarbon group having a carbon number of 1 to 10,
X″ is H or a hydrocarbon group having a carbon number of 1 to 10,
Y″ is an alkyloxy group having a carbon number of 1 to 10,
n is an integer of from 1 to 3, and
M 1 is H, Li, Na, K, or Cs.
11. The product according to claim 8 , wherein the compound (β) is a compound represented by the formula [IV]:
wherein
R 5 is a hydrocarbon group having a carbon number of 1 to 12,
R 7 is a hydrocarbon group having a carbon number of 1 to 12,
X″ is H or a hydrocarbon group having a carbon number of 1 to 10,
Y″ is an alkyloxy group having a carbon number of 1 to 10,
each of all X″s and all Y″s could be identical or could be different,
n and m are each independently an integer of from 1 to 3, and
M 1 is H, Li, Na, K or Cs.
12. The product according to claim 1 , wherein the product is a wiring substrate.