Gate valve
In a valve box that makes up a gate valve, a balance room is disposed on one side wall that faces toward a processing chamber. In the balance room, a first seal member is provided to surround a first pathway, and a second seal member is mounted on an outer edge of the balance room. Further, a balance port is formed in the balance room. The balance port communicates with an accommodating room that is formed in the interior of the valve box. In a valve closed state in which a valve disk is seated on a valve seat of the valve box, the pressure inside the accommodating room and the pressure inside the balance room are equalized or made uniform through the balance port.
1. A gate valve equipped with a valve box, a valve disk configured to be seated with respect to a valve seat formed in the valve box, a valve rod connected to the valve disk and configured to cause the valve disk to undergo linear movement as well as movements to approach and separate away from the valve seat, and a drive unit disposed in interior of a housing to which the valve box is connected, the drive unit linearly displacing the valve rod along an axial direction,
wherein the valve box comprises:
an accommodating room in which the valve disk is accommodated;
a wall portion that constitutes part of the accommodating room, and including the valve seat on which the valve disk is seated;
a pathway formed in the wall portion and which provides communication between the accommodating room and a processing chamber adjacent to the valve box;
a balance room recessed at a predetermined depth into an outer wall surface of the wall portion, the balance room facing in a direction of the processing chamber; and
a communication port, which provides communication between the balance room and the accommodating room, and is disposed out of communication with the pathway in interior of the balance room.
2. The gate valve according to claim 1 , wherein the pathway opens in a central portion of the balance room, and a seal member is disposed between the pathway and the balance room, the pathway and the balance room being separated by the seal member.
3. The gate valve according to claim 1 , wherein the pathway and the communication port are formed substantially in parallel.
4. The gate valve according to claim 3 , wherein the communication port is formed with a smaller cross-sectional size than the pathway.