MOS devices with non-uniform P-type impurity profile
An integrated circuit structure include a semiconductor substrate, a gate stack over the semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A silicon germanium region is disposed in the opening, wherein the silicon germanium region has a first p-type impurity concentration. A silicon cap substantially free from germanium is overlying the silicon germanium region. The silicon cap has a second p-type impurity concentration greater than the first p-type impurity concentration.
1. A method comprising:
forming a gate stack over a semiconductor substrate;
forming an opening extending into the semiconductor substrate, wherein the opening is on a side of the gate stack;
performing a first epitaxy to grow a first silicon germanium region in the opening, wherein during the first epitaxy, the first silicon germanium region is in-situ doped to a first p-type impurity concentration; and
performing a second epitaxy to grow a silicon cap substantially free from germanium over the first silicon germanium region, wherein during the second epitaxy, the silicon cap is in-situ doped to a second p-type impurity concentration higher than the first p-type impurity concentration.
2. The method of claim 1 further comprising, before the first epitaxy, performing a third epitaxy to grow a second silicon germanium region underlying the first silicon germanium region, with the second silicon germanium region having a higher germanium percentage than the first silicon germanium region, wherein during the third epitaxy, the second silicon germanium region is in-situ doped to a third p-type impurity concentration lower than the first p-type impurity concentration.
3. The method of claim 1 further comprising, before the first epitaxy, performing a third epitaxy to grow a second silicon germanium region underlying the first silicon germanium region, wherein during the third epitaxy, substantially no p-type impurity is doped.
4. The method of claim 1 , wherein a ratio of the second p-type impurity concentration to the first p-type impurity concentration is higher than about 10.
5. The method of claim 1 , wherein during the second epitaxy, no germanium is introduced into the silicon cap.
6. The method of claim 1 further comprising:
after forming the silicon cap, forming an Inter-Layer Dielectric (ILD) over the gate stack and the silicon cap;
forming a contact opening in the ILD, wherein the silicon cap is exposed to the contact opening;
after the contact opening is formed, performing a silicidation on the silicon cap; and
filling the contact opening with a conductive material.
7. The method of claim 6 , wherein after the silicidation, a portion of the silicon cap remains un-silicided, and wherein during the silicidation, a portion of the first silicon germanium region is silicided.
8. A method comprising:
forming a gate stack over a semiconductor substrate;
etching the semiconductor substrate to form an opening adjacent to the gate stack;
performing a first epitaxy to grow a silicon germanium region in the opening; and
performing a second epitaxy to grow a silicon cap over the silicon germanium region, wherein during the second epitaxy, the silicon cap is in-situ doped to a p-type impurity concentration higher than p-type impurity concentrations of all epitaxy regions in the opening.
9. The method of claim 8 , wherein the gate stack forms an interface with a top surface of the semiconductor substrate, and the silicon cap is higher than the interface.
10. The method of claim 8 , wherein the silicon cap is free from germanium.
11. The method of claim 8 , wherein the first epitaxy further comprises:
performing a third epitaxy to grow a first silicon germanium region in the opening, wherein during the third epitaxy, the first silicon germanium region is not in-situ doped with p-type impurities; and
performing a fourth epitaxy to grow a second silicon germanium region over the first silicon germanium region, wherein the second silicon germanium region is in-situ doped during the fourth epitaxy.
12. The method of claim 8 , wherein the first epitaxy further comprises:
performing a third epitaxy to grow a first silicon germanium region in the opening, wherein during the third epitaxy, the first silicon germanium region is in-situ doped to a first p-type impurity concentration; and
performing a fourth epitaxy to grow a second silicon germanium region over the first silicon germanium region, wherein the second silicon germanium region is in-situ doped to a second p-type impurity concentration higher than the first p-type impurity concentration.
13. The method of claim 12 , wherein a ratio of the second p-type impurity concentration to the first p-type impurity concentration is higher than about 10.
14. The method of claim 8 further comprising:
siliciding a middle portion of the silicon cap to form a silicide region, wherein after the siliciding, the silicon cap comprises portions remaining on opposite sides of the silicide region.
15. The method of claim 14 , wherein during the siliciding, a top portion of the silicon germanium region is silicided.
16. A method comprising:
forming a gate stack over a semiconductor substrate, with the gate stack forming an interface with a portion of the semiconductor substrate directly underlying the gate stack;
etching the semiconductor substrate to form an opening adjacent to the gate stack;
performing a first epitaxy to grow a first semiconductor region in the opening, with a top surface of the first semiconductor region higher than the interface, wherein during the first epitaxy, the first semiconductor region is in-situ doped to have a first p-type impurity concentration; and
performing a second epitaxy to grow a second semiconductor region overlying the first semiconductor region, wherein during the second epitaxy, the second semiconductor region is in-situ doped to a second p-type impurity concentration higher than the first p-type impurity concentration.
17. The method of claim 16 , wherein the second semiconductor region is a silicon cap free from germanium.
18. The method of claim 16 further comprising:
performing a third epitaxy to grow a third semiconductor region in the opening, wherein during the third epitaxy, no p-type impurity is in-situ doped, and the third semiconductor region is underlying the first semiconductor region.
19. The method of claim 16 further comprising:
siliciding a top portion of the second semiconductor region, wherein a bottom portion of the second semiconductor region directly underlying the top portion is not silicided.
20. The method of claim 16 further comprising:
siliciding a portion of the second semiconductor region and a portion of the first semiconductor region.