Method for bonding semiconductor devices on sustrate and bonding structure formed using the same
The present invention provides a bonding method in semiconductor manufacturing process and a bonding structure formed using the same, which can achieve wafer-level bonding under a condition of normal temperature and low pressure. The bonding method comprises generating bonding structures capable of being mutually mechanical interlocked, wherein the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked is higher than the bonding energy therebetween, and utilizing the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked to bond the bonding structures capable of being mutually mechanical interlocked.
1. A bonding method, comprising:
generating bonding structures capable of being mutually mechanical interlocked, wherein, the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked is higher than the bonding energy therebetween; and
utilizing the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked to bond the bonding structures capable of being mutually mechanical interlocked;
wherein the procedure of generating bonding structures capable of being mutually mechanical interlocked comprises:
forming a first under-bump method (UBM) layer pattern on a substrate:
forming a second UBM layer pattern on the first UBM layer pattern; and
forming a bump on the second UBM layer pattern, so as to form the bonding structures capable of being mutually mechanical interlocked, wherein the bump is bonded with the first UBM layer pattern when the bonding structures capable of being mutually mechanical interlocked are bonded.
2. The method according to claim 1 , wherein the bump is bonded with the first UBM layer pattern by applying low pressure and conducting thermal annealing treatment.
3. The method according to claim 1 , wherein the first UBM layer pattern is composed of an adhesion layer on the substrate and a seed layer on the adhesion layer.
4. The method according to claim 2 , wherein the first UBM layer pattern is composed of an adhesion layer on the substrate and a seed layer on the adhesion layer.
5. The method according to claim 4 , wherein the adhesion layer is formed by a metal material that can adhere to the substrate.
6. The method according to claim 5 , wherein the adhesion layer is formed by at least one of TiN, TiW, Ti, Cr, Ta, Mo, and Co.
7. The method according to claim 4 , wherein the seed layer is formed by a metal material.
8. The method according to claim 7 , wherein the seed layer is formed by Cu.
9. The method according to claim 1 , wherein the bump is formed by a metal material.
10. The method according to claim 1 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
11. The method according to claim 1 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
12. The method according to claim 2 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
13. The method according to claim 5 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
14. The method according to claim 6 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
15. The method according to claim 7 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
16. The method according to claim 8 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.
17. A bonding structure formed with the method according to claim 1 .
18. The bonding structure according to claim 17 , wherein the bonding sections of the bonding structures capable of being mutually mechanical interlocked are beveled sections.