Array substrate and method for manufacturing the same
Disclosed herein is a method for manufacturing an array substrate. The method includes forming a source electrode and a drain electrode on a substrate. A semiconductor layer, an organic insulating layer, and a gate electrode layer are sequentially formed to cover the substrate, the source electrode, and the drain electrode. A patterned photoresist layer is formed on the gate electrode layer. The exposed portion of the gate electrode layer, and a portion of the organic insulative layer and a portion of the semiconductor layer thereunder are removed to form a gate electrode. An organic passivation layer is formed on the gate electrode, the source electrode, and the drain electrode. The organic passivation layer has a contact window to expose a portion of the drain electrode. A pixel electrode is formed on the organic passivation layer and the exposed portion of the drain electrode.
1. A method for manufacturing an array substrate, comprising:
providing a substrate;
forming a source electrode and a drain electrode on the substrate;
forming a semiconductor layer to cover the substrate, the source electrode and the drain electrode;
forming a patterned organic insulating layer on the semiconductor layer to define a channel layer of the semiconductor layer;
forming a gate electrode layer on the patterned organic insulating layer and the semiconductor layer;
forming a patterned photoresist layer on the gate electrode layer, wherein the patterned photoresist layer is disposed above the patterned organic insulating layer, and a portion of the gate electrode layer is exposed;
removing the exposed portion of the gate electrode layer and a portion of the semiconductor layer under the exposed portion of the gate electrode layer by an etching process using an identical etchant to form a gate electrode and the channel layer, wherein a sidewall of the channel layer is continuous with a sidewall of the patterned organic insulating layer;
forming an organic passivation layer on the gate electrode, the source electrode and the drain electrode, wherein the organic passivation layer has a contact window to expose a portion of the drain electrode; and
forming a pixel electrode on the organic passivation layer, wherein the pixel electrode is electrically connected to the drain electrode through the contact window,
wherein forming the patterned organic insulating layer on the semiconductor layer is before forming the note electrode layer on the patterned organic insulating layer.
2. The method of claim 1 , wherein the patterned photoresist layer has an area less than an area of the patterned organic insulating layer.
3. The method of claim 1 , wherein the organic insulating layer comprises polyimide or polysiloxane.
4. The method of claim 1 , wherein the step of providing the substrate comprises:
providing a rigid substrate; and
forming a flexible polymer layer on the rigid substrate, wherein the source electrode and the drain electrode are formed on the flexible polymer layer.
5. The method of claim 4 , further comprising removing the rigid substrate after the step of forming the pixel electrode on the organic passivation layer.
6. The method of claim 1 , wherein an area of the gate electrode is less than an area of the patterned organic insulating layer.
7. The method of claim 1 , wherein the sidewall of the patterned organic insulating layer is not continuous with a sidewall of the gate electrode.