Testing of semiconductor chips with microbumps
A package includes a semiconductor chip. The semiconductor chip includes a test pad, and a plurality of microbump pads, wherein each microbump pad of the plurality of microbump pads is electrically connected to the test pad. The package further includes a substrate; and a plurality of microbumps configured to electrically connect the semiconductor chip to the substrate, wherein each microbump of the plurality of microbumps is electrically connected to a corresponding microbump pad of the plurality of microbump pads. The package further includes a package substrate, wherein the package substrate comprises a bump pad, wherein an area of the bump pad is greater than a combined area of the test pad and the plurality of microbump pads. The package further includes a bump configured to electrically connect the substrate to the package substrate.
1. A package comprising:
a semiconductor chip, wherein the semiconductor chip comprises:
a test pad, and
a plurality of microbump pads that are electrically connected to the test pad, wherein each microbump pad has a first surface area that is less than a second surface area of the test pad;
a substrate; and
a plurality of microbumps configured to electrically connect the semiconductor chip to the substrate, wherein each microbump of the plurality of microbumps is electrically connected to a corresponding microbump pad of the plurality of microbump pads.
2. The package of claim 1 , further comprising:
a package substrate, wherein the package substrate comprises a bump pad, wherein an area of the bump pad is greater than a combined area of the test pad and the plurality of microbump pads; and
a bump configured to electrically connect the substrate to the package substrate.
3. The package of claim 1 , further comprising: a passivation material covering the test pad.
4. The package of claim 1 , wherein the plurality of microbump pads are located in a symmetrical arrangement around the test pad.
5. The package of claim 1 , wherein the plurality of microbump pads are asymmetrically arranged with respect to the test pad.
6. The package of claim 1 , wherein a shape of the test pad is selected from the group consisting of a square, a rectangle, a circle, a hexagon, and an octagon.
7. The package of claim 1 , wherein a minimum width of the test pad is at least 60 microns (μm).
8. The package of claim 2 , wherein a diameter or minimum width of the bump ranges from about 75 μm to about 150 μm.
9. The package of claim 1 , wherein a first microbump pad of the plurality of microbump pads is electrically connected to the test pad through a second microbump pad of the plurality of microbump pads.
10. The package of claim 1 , wherein a connection between a first microbump pad of the plurality of microbump pads and the test pad comprises:
a first portion extending in a first direction, and
a second portion extending in a second direction different from the first direction.
11. A package comprising:
a semiconductor chip, wherein the semiconductor chip comprises:
a test pad, and
a plurality of microbump pads that are electrically connected to the test pad, wherein a width of each microbump pad of the plurality of microbump pads is equal to or less than a width of the test pad; and
a plurality of microbumps, wherein each microbump of the plurality of microbumps is electrically connected to a corresponding microbump pad of the plurality of microbump pads.
12. The package of claim 11 , further comprising: a passivation material covering the test pad.
13. The package of claim 12 , wherein the passivation material has a thickness ranging from about 1 micron (μm) to about 10 μm.
14. The package of claim 12 , wherein the passivation material comprises an organic polymer, a photosensitive polyimide or a dielectric material.
15. The package of claim 12 , wherein the passivation material includes a plurality of openings through which the plurality of microbumps are electrically coupled to the corresponding microbump pads.
16. A device comprising:
a test pad on a chip;
an array of connection pads arranged around the test pad, wherein a width of each connection pad of the array of connection pads is equal to or less than a width of the test pad; and
an interconnect structure connected to the array of connection pads, wherein the test pad is connected to each connection pad of the array of connection pads through the interconnect structure.
17. The device of claim 16 , further comprising:
a layer of passivation material covering the test pad.
18. The device of claim 17 , further comprising:
an array of connection bumps, wherein each connection bump of the array of connection bumps is electrically connected to a corresponding connection pad of the array of connection pads.
19. The device of claim 16 , wherein the array of connection pads is arranged in a symmetrical arrangement around the test pad.
20. The device of claim 16 , wherein the array of connection pads is arranged in an asymmetrical arrangement around the test pad.