IP Library Granted Patent US 9,627,285
Granted Patent B2
US 9,627,285 · App. 14/341,197 · Granted Apr 18, 2017

Package substrate

Inventor: Dyi-Chung Hu (Zhudong Township, Hsinchu County, TW)
H01L23/12H01L23/49833H01L23/13H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/15151H01L2924/15174H01L2924/15311
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Quick Facts
Patent No.
US 9,627,285
App. No.
14/341,197
Granted
Apr 18, 2017
Kind
B2
Abstract

A package substrate is disclosed. The package substrate includes a molding layer, a redistribution structure, and a build-up structure. The redistribution structure is embedded in the molding layer with a surface exposed by the molding layer. The build-up structure is formed on the bottom surface of the molding layer. An inner stress caused by a CTE difference between different materials in the package substrate is reduced by forming at least one groove which is arranged around the periphery of the redistribution structure onto the top surface of the molding layer, thereby improving the problem of the redistribution structure cracking in the prior art.

Claims (56)

1. A package substrate, comprising:

a redistribution structure having a plurality of top electrode pads, the plurality of top electrode pads being configured with a first density;

a chip mounted on the plurality of top electrode pads;

a build-up layer configured on bottom of the redistribution structure, the build-up layer having a plurality of bottom mounting pads, the plurality of bottom mounting pads being configured with a second density adaptive for the substrate to mount onto a printed circuit board, the second density being lower than the first density;

a molding layer embedding the redistribution structure therein; and

a groove extending around the redistribution structure,

wherein

the groove contains no conductive material,

the redistribution structure and the groove are entirely below the chip, and

the groove extends from a top surface of the molding layer, through an entire thickness of the molding layer, and into a portion of the build-up layer.

2. A package substrate as claimed in claim 1 , wherein

the build-up layer includes a topmost dielectric layer in which a topmost circuitry of the build-up layer is embedded, and

the molding layer has a bottom surface in direct contact with a top surface of the topmost dielectric layer of the build-up layer.

3. A package substrate as claimed in claim 2 , wherein

the groove is co-elevational with an entire thickness of the redistribution structure, and

a depth of the groove is greater than the entire thickness of the redistribution structure.

4. A package substrate as claimed in claim 2 , wherein the groove extends continuously around the redistribution structure.

5. A package substrate as claimed in claim 2 , wherein the groove abuts the redistribution structure.

6. A package substrate as claimed in claim 2 , wherein, in a top plan view, the groove comprises four independent section grooves arranged along four sides of the redistribution structure, respectively.

7. A package substrate as claimed in claim 2 , wherein, in a top plan view, the groove comprises a plurality of holes arranged along four sides of the redistribution structure.

8. A package substrate as claimed in claim 2 , wherein, in a top plan view, the groove comprises a plurality of rectangular grooves arranged along four sides of the redistribution structure.

9. A package substrate as claimed in claim 2 , further comprising:

an interposer embedded in the redistribution structure.

10. A package substrate as claimed in claim 1 , wherein a bottom of the groove is below a bottommost circuitry of the redistribution structure.

11. A package substrate as claimed in claim 10 , wherein

the groove is co-elevational with an entire thickness of the redistribution structure, and

the depth of the groove is greater than the entire thickness of the redistribution structure.

12. A package substrate as claimed in claim 11 , wherein a portion of the groove above the bottom of the groove is co-elevational with a topmost circuitry of the build-up layer.

13. A package substrate as claimed in claim 12 , wherein

the build-up layer includes a topmost dielectric layer in which the topmost circuitry of the build-up layer is embedded, and

the molding layer has a bottom surface in direct contact with a top surface of the topmost dielectric layer of the build-up layer.

14. A package substrate as claimed in claim 1 , further comprising:

an interposer embedded in the redistribution structure.

15. A package substrate, comprising:

a redistribution structure having a plurality of top electrode pads, the plurality of top electrode pads being configured with a first density adaptive for a chip to mount thereon;

a build-up layer configured on bottom of the redistribution structure, the build-up layer having a plurality of bottom mounting pads, the plurality of bottom mounting pads being configured with a second density adaptive for the substrate to mount onto a printed circuit board, the second density being lower than the first density;

a molding layer embedding the redistribution structure therein;

a chip mounted on the plurality of top electrode pads;

a groove extending around the redistribution structure; and

a dielectric material filled in the groove,

wherein

the groove contains no conductive material,

a portion of the molding layer is configured between the groove and the redistribution structure,

the material of the dielectric material filled in the groove is different from the material of the molding layer,

the redistribution structure and the groove are entirely below the chip,

the build-up layer includes a topmost dielectric layer in which a topmost circuitry of the build-up layer is embedded,

the groove extends from a top surface of the molding layer, through an entire thickness of the molding layer, and into the topmost dielectric layer of the build-up layer,

the molding layer has a bottom surface in direct contact with a top surface of the topmost dielectric layer of the build-up layer,

the groove is co-elevational with an entire thickness of the redistribution structure, and

the depth of the groove is greater than the entire thickness of the redistribution structure.

16. A package substrate as claimed in claim 15 , wherein a width of the portion of the molding layer is smaller than a width of the groove.

17. A package substrate as claimed in claim 15 , wherein the dielectric material filled in the groove is silicone.

18. A package substrate as claimed in claim 15 , further comprising:

an interposer embedded in the redistribution structure.

19. A package substrate as claimed in claim 18 , wherein

the dielectric material filled in the groove is silicone.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2026
From: HU, DYI-CHUNG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
Reel/Frame 075543/0195 →
Continuity (1)
Related Publication 20160027712A1 · Jan 28, 2016