IP Library Granted Patent US 9,627,355
Granted Patent B2
US 9,627,355 · App. 15/143,892 · Granted Apr 18, 2017

Package-on-package structure having polymer-based material for warpage control

Inventors: Meng-Tse Chen (Changzhi Township, TW); Yu-Chih Liu (Taipei, TW); Hui-Min Huang (Taoyuan, TW); Wei-Hung Lin (Xinfeng Township, TW); Jing Ruei Lu (Taipei, TW); Ming-Da Cheng (Jhubei, TW); Chung-Shi Liu (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L25/0652H01L21/561H01L21/563H01L23/00H01L23/3121H01L23/562H01L25/0655H01L25/50H01L2224/16H01L2224/32225H01L2224/73204H01L2224/92125H01L2225/06513H01L2225/06555H01L2225/06582H01L2924/15311
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Quick Facts
Patent No.
US 9,627,355
App. No.
15/143,892
Granted
Apr 18, 2017
Kind
B2
Abstract

A package on package structure providing mechanical strength and warpage control includes a first package component coupled to a second package component by a first set of conductive elements. A first polymer-comprising material is arranged between the first package component and the second package component. The first polymer-comprising material surrounds the first set of conductive elements and the second package component. A third package component is coupled to the second package component by a second set of conductive elements. An underfill is arranged on the second package component and surrounds the second set of conductive elements. The first polymer-comprising material extends past sidewalls of the underfill.

Claims (44)

1. A semiconductor device, comprising:

a first package component having an upper surface coupled to a lower surface of a second package component by a first set of conductive elements;

a first polymer-comprising material arranged between the first package component and the second package component and surrounding the first set of conductive elements and the second package component;

a third package component coupled to the second package component by a second set of conductive elements;

an underfill arranged on the second package component and surrounding the second set of conductive elements, wherein the first polymer-comprising material extends past sidewalls of the underfill; and

a second polymer-comprising material surrounding the underfill and the third package component, wherein the second polymer-comprising material contacts upper surfaces of the first polymer-comprising material and the second package component, wherein the upper surfaces of the first polymer-comprising material and the second package component face a same direction as the upper surface of the first package component.

2. The semiconductor device of claim 1 , wherein the underfill comprises an upper surface that is below an upper surface of the third package component.

3. The semiconductor device of claim 1 , wherein the second polymer-comprising material contacts the sidewalls of the underfill and the third package component.

4. The semiconductor device of claim 1 ,

wherein the underfill has angled sidewalls that cause a width of the underfill to increase as a distance from the second package component decreases; and

wherein the second polymer-comprising material has angled sidewalls abutting the angled sidewalls of the underfill.

5. The semiconductor device of claim 1 , further comprising:

a fourth package component coupled to the second package component by a third set of conductive elements, wherein the second polymer-comprising material is arranged between the third package component and the fourth package component.

6. The semiconductor device of claim 1 , wherein the first polymer-comprising material comprises a top surface below a bottom surface of the third package component.

7. The semiconductor device of claim 1 , wherein an outermost sidewall of the second package component is laterally offset from an outermost sidewall of the third package component.

8. A semiconductor package, comprising

a first package component having an upper surface coupled to a lower surface of a second package component by a first set of conductive elements;

a first polymer-comprising material surrounding the first set of conductive elements and the second package component;

a third package component coupled to the second package component by a second set of conductive elements;

an underfill arranged on the second package component and surrounding the second set of conductive elements;

a second polymer-comprising material arranged onto upper surfaces of the first polymer-comprising material and the second package component, and contacting the underfill and the third package component; and

wherein the second polymer-comprising material laterally straddles vertical sidewalls of the second package component.

9. The semiconductor package of claim 8 , wherein the first polymer-comprising material comprises a top surface below a top surface of the second package component.

10. The semiconductor package of claim 8 , wherein the second polymer-comprising material contacts upper surfaces of the first polymer-comprising material and the second package component, and wherein the upper surfaces of the first polymer-comprising material and the second package component face a same direction as the upper surface of the first package component.

11. The semiconductor package of claim 8 , wherein the first polymer-comprising material comprises a substantially flat upper surface.

12. The semiconductor package of claim 8 ,

wherein the underfill has angled sidewalls that cause a width of the underfill to increase as a distance from the second package component decreases; and

wherein the second polymer-comprising material has angled sidewalls abutting the angled sidewalls of the underfill.

13. The semiconductor package of claim 8 , further comprising:

a fourth package component coupled to the second package component by a third set of conductive elements, wherein the second polymer-comprising material is arranged between the third package component and the fourth package component.

14. An integrated chip, comprising

a first package component having an upper surface coupled to a lower surface of a second package component by a first set of conductive elements;

a first polymer-comprising material surrounding the first set of conductive elements and the second package component;

a third package component coupled to the second package component by a second set of conductive elements;

a fourth package component coupled to the second package component by a third set of conductive elements;

a second polymer-comprising material contacting upper surfaces of the first polymer-comprising material and the second package component, and contacting opposing sidewalls of the third package component and the fourth package component; and

wherein the upper surfaces of the first polymer-comprising material and the second package component face a same direction as the upper surface of the first package component.

15. The integrated chip of claim 14 , further comprising:

an underfill arranged on the second package component and surrounding the second set of conductive elements and the third set of conductive elements.

16. The integrated chip of claim 14 , wherein the first polymer-comprising material comprises a substantially flat upper surface.

17. The semiconductor device of claim 1 , wherein the second polymer-comprising material laterally straddles vertical sidewalls of the second package component.

18. The semiconductor device of claim 1 , wherein the first polymer-comprising material has an upper surface below a top surface of the second package component.

19. The semiconductor device of claim 1 , wherein the second polymer-comprising laterally contacts outermost sidewalls of the second package component.

20. The semiconductor device of claim 5 , wherein the second polymer-comprising material has sidewalls, laterally arranged between the third package component and the fourth package component, which are sloped in opposite directions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2016
From: CHEN, MENG-TSE; LIU, YU-CHIH; HUANG, HUI-MIN; LIN, WEI-HUNG; LU, JING RUEI; CHENG, MING-DA; LIU, CHUNG-SHI
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 038435/0082 →
Continuity (2)
Continuation 13539136 · Jun 29, 2012
Related Publication 20160247782A1 · Aug 25, 2016