Ultrasonic cleaning method and apparatus
There is provided an ultrasonic cleaning method capable of reliably cleaning to remove adhesive components even when the adhesive components adhere to a rigid substrate. The ultrasonic cleaning method comprises performing the following steps (1) to (5), in this order: (1) a step of immersing a rigid substrate having an adhesive adhering to a surface thereof in an aromatic alcohol-based cleaning liquid at 25 to 60° C.; (2) a step of cleaning off the adhesive on the rigid substrate by ultrasonic oscillation while keeping the state where the rigid substrate is immersed in the step (1); (3) a step of subsequently immersing the rigid substrate in a glycol ether-based cleaning liquid at 25 to 60° C.; (4) a step of rinsing off the aromatic alcohol-based cleaning liquid adhering to the rigid substrate by ultrasonic oscillation while keeping the state where the rigid substrate is immersed in the step (3); and (5) a step of subsequently rinsing off the glycol ether-based cleaning liquid and aromatic alcohol-based cleaning liquid adhering to the rigid substrate with water.
1. An apparatus for cleaning a rigid substrate having an adhesive adhering to a surface thereof, the apparatus comprising:
a first cleaning liquid tank for cleaning a rigid substrate having an adhesive adhering to a surface thereof, the first cleaning liquid tank contains a first cleaning liquid including an aromatic alcohol at 25 to 60° C. and being equipped with an ultrasonic oscillator;
a second cleaning liquid tank for rinsing off the first cleaning liquid adhering to the rigid substrate, the second cleaning liquid tank being installed downstream of the first cleaning liquid tank, the second cleaning liquid tank contains a second cleaning liquid including a glycol ether at 25 to 60° C., and being equipped with an ultrasonic oscillator; and
a water washing chamber for rinsing off the second and first cleaning liquid adhering to the rigid substrate with water, the chamber being installed downstream of the second cleaning liquid tank, and
wherein the first cleaning liquid includes of benzyl alcohol, water, and sodium xylenesulfonate-based surfactant, and
wherein the second cleaning liquid includes diethylene glycol monobutyl ether, polyoxyethylene lauryl phenyl ether, and water, or of diethylene glycol monobutyl ether, pentaethylene glycol monododecyl ether, polyoxyethylene lauryl amine, and water.
2. The apparatus according to claim 1 , wherein the apparatus further comprises an evaporator for evaporating water contained in a waste liquid from the water washing chamber.
3. The apparatus according to claim 2 , wherein the apparatus further comprises a storage tank for storing the waste liquid from the water washing chamber, the storage tank being installed between the water washing chamber and the evaporator.
4. The apparatus according to claim 1 , wherein the second cleaning liquid and the first cleaning liquid adhering to the rigid substrate are rinsed off with shower water.
5. The apparatus according to claim 1 , wherein
the adhesive is a photocurable (meth)acrylic adhesive.