Array substrate, method for fabricating the same and display device
An array substrate, a method for fabricating the same and a display device are disclosed. The array substrate includes a base substrate, and further includes a metal shield layer, a semiconductor layer, a gate insulation layer, a gate metal layer, an interlayer dielectric layer, a source-drain metal layer and a pixel electrode layer sequentially formed on the base substrate. At least one first via hole penetrating to the metal shield layer is formed in the interlayer dielectric layer and the gate insulation layer. The source-drain metal layer is formed in the at least one first via hole and on the interlayer dielectric layer having the at least one first via hole.
1. An array substrate, comprising a base substrate, and further comprising a metal shield layer, a semiconductor layer, a gate insulation layer, a gate metal layer, an interlayer dielectric layer, a source-drain metal layer and a pixel electrode layer sequentially formed on the base substrate, wherein
at least one first via hole penetrating to the metal shield layer is formed in the interlayer dielectric layer and the gate insulation layer;
the source-drain metal layer is formed in the at least one first via hole and on the interlayer dielectric layer having the at least one first via hole, and
the gate metal layer comprises patterns of a common electrode line, and the common electrode line in the gate metal layer is sandwiched between the source-drain metal layer and the metal shield layer, a perpendicular projection of the common electrode line on the base substrate overlaps with a perpendicular projection of the metal shield layer on the base substrate and a perpendicular projection of the source-drain metal layer on the base substrate.
2. The array substrate of claim 1 , wherein the source-drain metal layer overlays an inner wall of the at least one first via hole and is electrically connected to the metal shield layer.
3. The array substrate of claim 1 , wherein a cross section of the at least one first via hole is in shape of a circle, a square, a triangle or a trapezoid.
4. The array substrate of claim 1 , further comprising:
a buffer layer formed between the metal shield layer and the semiconductor layer, the at least one first via hole is formed in the interlayer dielectric layer, the gate insulation layer and the buffer layer.
5. The array substrate of claim 1 , wherein the source-drain metal layer comprises patterns of a source electrode, a drain electrode and a data line.
6. The array substrate of claim 5 , wherein both a source electrode via hole and a drain electrode via hole are formed in the interlayer dielectric layer and the gate insulation layer, the source electrode via hole and the drain electrode via hole being configured for electrically connecting the semiconductor layer respectively to the source electrode and the drain electrode.
7. The array substrate of claim 1 , further comprising:
a planarized layer, a common electrode layer and a passivation layer sequentially formed between the source-drain metal layer and the pixel electrode layer;
wherein a second via hole and a third via hole which correspond to each other and penetrate to the source-drain metal layer are respectively formed in the planarized layer and the passivation layer;
the pixel electrode layer is formed in the third via hole and on the passivation layer having the third via hole.
8. The array substrate of claim 1 , wherein the semiconductor layer is a polycrystalline silicon layer.
9. The array substrate of claim 1 , wherein the gate metal layer further comprises patterns of a gate electrode, and a gate line.
10. A display device comprising the array substrate of claim 1 .
11. A method for fabricating an array substrate, comprising:
sequentially forming a metal shield layer, a semiconductor layer, a gate insulation layer, a gate metal layer, an interlayer dielectric layer on a base substrate;
forming at least one first via hole in the interlayer dielectric layer and the gate insulation layer, the at least one first via hole penetrating to the metal shield layer;
forming a source-drain metal layer in the at least one first via hole and on the interlayer dielectric layer having the at least one first via hole, wherein
the gate metal layer comprises patterns of a common electrode line, and the common electrode line in the gate metal layer is sandwiched between the source-drain metal layer and the metal shield layer, a perpendicular projection of the common electrode line on the base substrate overlaps with a perpendicular projection of the metal shield layer on the base substrate and a perpendicular projection of the source-drain metal layer on the base substrate.
12. The method of claim 11 , further comprising forming a pixel electrode layer above the source-drain metal layer.
13. The method of claim 11 , wherein the semiconductor layer is a polycrystalline silicon layer; the method further comprises the following step after forming the metal shield layer and before forming the semiconductor layer:
forming a buffer layer on the metal shield layer, wherein the at least one first via hole is formed in the interlayer dielectric layer, the gate insulation layer and the buffer layer.
14. The method of claim 11 , wherein the source-drain metal layer comprises patterns of a source electrode, a drain electrode and a data line; the method further comprises the following step after forming the interlayer dielectric layer and before forming the source-drain metal layer:
forming a source electrode via hole and a drain electrode via hole in the interlayer dielectric layer and the gate insulation layer, the source electrode via hole and the drain electrode via hole are configured for electrically connecting the semiconductor layer respectively to the source electrode and the drain electrode.
15. The method of claim 12 , wherein the method further comprises the following step after forming the source-drain metal layer in the first via hole and on the interlayer dielectric layer having the first via hole and before forming the pixel electrode layer above the source-drain metal layer:
sequentially forming a planarized layer, a common electrode layer and a passivation layer on the source-drain metal layer;
wherein a second via hole and a third via hole which correspond to each other and penetrate to the source-drain metal layer are respectively formed in the planarized layer and the passivation layer;
forming the pixel electrode layer above the source-drain metal layer comprises:
forming the pixel electrode layer in the third via hole and on the passivation layer having the third via hole.
16. The array substrate of claim 2 , further comprising:
a buffer layer formed between the metal shield layer and the semiconductor layer, the at least one first via hole is formed in the interlayer dielectric layer, the gate insulation layer and the buffer layer.
17. The array substrate of claim 3 , further comprising:
a buffer layer formed between the metal shield layer and the semiconductor layer, the at least one first via hole is formed in the interlayer dielectric layer, the gate insulation layer and the buffer layer.
18. The array substrate of claim 2 , further comprising:
a planarized layer, a common electrode layer and a passivation layer sequentially formed between the source-drain metal layer and the pixel electrode layer;
wherein a second via hole and a third via hole which correspond to each other and penetrate to the source-drain metal layer are respectively formed in the planarized layer and the passivation layer;
the pixel electrode layer is formed in the third via hole and on the passivation layer having the third via hole.
19. The array substrate of claim 4 , further comprising:
a planarized layer, a common electrode layer and a passivation layer sequentially formed between the source-drain metal layer and the pixel electrode layer;
wherein a second via hole and a third via hole which correspond to each other and penetrate to the source-drain metal layer are respectively formed in the planarized layer and the passivation layer;
the pixel electrode layer is formed in the third via hole and on the passivation layer having the third via hole.
20. The array substrate of claim 6 , further comprising:
a planarized layer, a common electrode layer and a passivation layer sequentially formed between the source-drain metal layer and the pixel electrode layer;
wherein a second via hole and a third via hole which correspond to each other and penetrate to the source-drain metal layer are respectively formed in the planarized layer and the passivation layer;
the pixel electrode layer is formed in the third via hole and on the passivation layer having the third via hole.