Vertical junctionless transistor device and manufacturing methods
A method for forming a semiconductor device includes forming a fin device structure in a buffer layer on a substrate. The fin device structure includes a lower portion extending over the silicon substrate and a fin structure protruding above the lower portion. The method also includes forming a sacrificial layer disposed over the fin device structure and forming a device semiconductor layer disposed over a surface of the sacrificial layer. A gate dielectric layer is then formed and is disposed over a surface of the device semiconductor layer. A gate electrode layer is formed and disposed over a surface of the gate dielectric layer. The method includes removing a portion of the sacrificial layer to form a cavity surrounding the fin structure and performing an oxidation process to form a thermal oxide layer in the cavity surrounding the side surface of the fin structure.
1. A method for forming a semiconductor device, comprising:
providing a substrate;
forming a buffer layer including a lower portion extending over the substrate and a fin structure protruding above the lower portion;
forming a sacrificial layer disposed over a side surface of the fin structure and a top surface of the lower portion of the buffer;
forming a device semiconductor layer disposed over a surface of the sacrificial layer;
forming a gate dielectric layer disposed over a surface of the device semiconductor layer;
forming a gate electrode layer disposed over a surface of the gate dielectric layer;
removing a portion of the sacrificial layer to form a cavity surrounding the fin structure; and
performing an oxidation process to form a thermal oxide layer in the cavity surrounding the side surface of the fin structure.
2. The method of claim 1 , wherein the sacrificial layer is configured to be a seed layer for the formation of the device semiconductor layer using an epitaxial process.
3. The method of claim 1 , wherein the substrate comprises a silicon substrate.
4. The method of claim 1 , wherein the gate dielectric layer comprises a high k oxide layer, and the gate electrode layer comprises a metal layer.
5. The method of claim 1 , wherein:
the buffer layer comprises a silicon germanium (SiGe) layer;
the sacrificial layer comprises an aluminum arsenide (AlAs) layer; and
the device semiconductor layer comprises one or more of indium gallium arsenide (InGaAs), indium arsenide (InAs), indium antimonide (InSb), or germanium (Ge).
6. The method of claim 1 , further comprising, after forming the gate electrode layer, performing a planarization process to expose a top surface of the fin structure.
7. The method of claim 1 , further comprising:
removing a second portion of the sacrificial layer from a surface of the sacrificial layer; and
performing an oxidation process to form a thermal oxide layer on the surface of the lower portion of the buffer layer.
8. The method of claim 1 , further comprising patterning the gate electrode layer to form a metal gate structure, thereby defining a source region and a drain region in the device semiconductor layer.
9. The method of claim 1 , wherein the fin structure has a circular cross-section.
10. The method of claim 1 , wherein the fin structure has an elliptical cross-section.
11. The method of claim 1 , wherein the fin structure has a rectangular cross-section.