Flexure of disk drive suspension, and method of manufacturing conductive circuit portion of flexure
A suspension includes a load beam and a flexure. The flexure has a metal base and a conductive circuit portion. The conductive circuit portion has an insulating layer formed on the metal base, and a conductor formed on the insulating layer. The conductive circuit portion includes a first region which constitutes a part of the conductive circuit portion in the longitudinal direction, and a second region which constitutes another part of the same in the longitudinal direction. The conductor includes a thin conductor portion having a first thickness arranged in the first region, and a thick conductor portion having a second thickness arranged in the second region. The second thickness is greater than the first thickness.
1. A flexure mounted on a load beam of a disk drive suspension, the flexure comprising:
a metal base formed of a stainless-steel plate; and
a conductive circuit portion arranged along the metal base,
the conductive circuit portion comprising:
an insulating layer formed of an electrically insulating material and formed on the metal base; and
a conductor formed on the insulating layer,
the conductor comprising:
a thin conductor portion formed in a first region which constitutes a part of the conductive circuit portion in a longitudinal direction; and
a thick conductor portion formed in a second region which constitutes another part of the conductive circuit portion in the longitudinal direction, a thickness of the thick conductor portion being greater than that of the thin conductor portion,
wherein:
the flexure comprises a gimbal portion comprising a tongue; and
the conductive circuit portion includes an unsupported conductive circuit portion without a metal base which is arranged along the tongue, the unsupported conductive circuit portion comprising the thin conductor portion.
2. The flexure of claim 1 , wherein:
the flexure comprises a flexure tail portion;
the flexure tail portion comprises:
an opening formed in the metal base;
a bent portion of the metal base which is bent in a thickness direction at the opening; and
a trace curved portion which is curved in the thickness direction at a position facing the opening; and
the trace curved portion comprises the thick conductor portion.
3. The flexure of claim 1 , wherein:
the conductor comprises a terminal portion which is connected to a terminal of an electronic circuit; and
the terminal portion comprises the thick conductor portion.
4. The flexure of claim 1 , wherein:
the conductive circuit portion comprises a plurality of conductors formed on the insulating layer and arranged to be spaced apart from each other in a width direction of the conductive circuit portion; and
the plurality of conductors comprise:
thin conductor portions formed in a part of the conductors, the thin conductor portions being formed in a region which constitutes the part of the conductive circuit portion in the longitudinal direction; and
thick conductor portions formed in a remainder of the conductors, the thick conductor portions being formed in a region which constitutes the another part of the conductive circuit portion in the longitudinal direction, a thickness of each of the thick conductor portions being greater than that of each of the thin conductor portions.
5. A method of manufacturing a conductive circuit portion of a flexure, the flexure comprising a metal base, the conductive circuit portion comprising an insulating layer formed on the metal base, and a conductor formed on the insulating layer, the conductor comprising a thin conductor portion formed in a part of the conductor in a longitudinal direction, and a thick conductor portion formed in another part of the conductor in the longitudinal direction, the method of manufacturing the conductive circuit portion comprising:
a first masking process of forming a first resist, a height of the first resist corresponding to a thickness of the thick conductor portion, on the insulating layer, thereby forming a masking portion which is covered by the first resist, and a thin conductor formation space and a thick conductor formation space which are not covered by the first resist;
a first plating process of plating each of the thin conductor formation space and the thick conductor formation space with copper up to a thickness of the thin conductor portion, thereby forming a plated layer having a first thickness, which is shorter than the first resist, within the thin conductor formation space and the thick conductor formation space;
a second masking process of filling an opening of the thin conductor formation space with a second resist, thereby covering the plated layer within the thin conductor formation space;
a second plating process of forming an additional plated layer having a second thickness for the thick conductor portion on the plated layer within the thick conductor formation space, after the second masking process; and
a process of removing the first resist and the second resist after the second plating process.
6. A flexure mounted on a load beam of a disk drive suspension, the flexure comprising:
a metal base formed of a stainless-steel plate; and
a conductive circuit portion arranged along the metal base,
the conductive circuit portion comprising:
an insulating layer formed of an electrically insulating material and formed on the metal base; and
a conductor formed on the insulating layer,
the conductor comprising:
a thin conductor portion formed in a first region which constitutes a part of the conductive circuit portion in a longitudinal direction; and
a thick conductor portion formed in a second region which constitutes another part of the conductive circuit portion in the longitudinal direction, a thickness of the thick conductor portion being greater than that of the thin conductor portion,
wherein:
the load beam comprises a pair of hinge portions; and
the conductive circuit portion includes a flexible conductive circuit portion arranged between the hinge portions, the flexible conductive circuit portion comprising the thin conductor portion.