Method for fabrication of ceramic dielectric films on copper foils
The present invention provides copper substrate coated with a lead-lanthanum-zirconium-titanium (PLZT) ceramic film, which is prepared by a method comprising applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250° C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450° C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750° C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas.
1. An article of manufacture of comprising a lead-lanthanum-zirconium-titanium (PLZT) ceramic film on a copper substrate wherein the PLZT has a polycrystalline pervoskite phase without observable copper oxide peaks at 2θ of 29.2 and 36.2 as determined by X-ray diffraction (XRD) analysis; wherein the PLZT has a composition with the empirical formula Pb 0.92 La 0.08 Zr 0.52 Ti 0.48 O 3 .
2. The article of manufacture of claim 1 , wherein the copper substrate comprises a copper foil having a thickness in the range of about 0.01 mm to about 1 mm.
3. A capacitor comprising the article of manufacture of claim 1 .