IP Library Granted Patent US 9,679,791
Granted Patent B2
US 9,679,791 · App. 14/920,900 · Granted Jun 13, 2017

Heater elements with enhanced cooling

Inventor: Arsalan Emami (Aliso Viejo, CA)
H01L21/67098F27B5/08F27D1/0006F27D11/00H01L21/67109H01L23/467F27D2009/0005H01L2924/0002
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,679,791
App. No.
14/920,900
Granted
Jun 13, 2017
Kind
B2
Abstract

A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

Claims (35)

1. A heater assembly and insulation, comprising:

a layer of insulation material, wherein the layer of insulation is configured to insulate a heater element from an outside ambient;

one or more channels, wherein the plurality of channels are configured within a recess, wherein the recess is between an outer surface of the layer of insulation material and a protected shell of the heater assembly;

a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet;

a restrictor assembly coupled to the plurality of channels, and

wherein the restrictor assembly is configured to adjustably change a flow rate of the plurality of channels.

2. The heater assembly and insulation as in claim 1 , wherein the plurality of channels comprises straight lines or curved lines passing along the length of the recess.

3. The heater assembly and insulation as in claim 1 , wherein a locking assembly coupled to a restrictor assembly, wherein the locking assembly is configured to fixedly couple the restrictor assembly within the recess.

4. The heater assembly and insulation as in claim 1 further comprising:

a blower assembly coupled to the inlet of the manifold.

5. The heater assembly and insulation as in claim 1 wherein the plurality of channels is vacuum formed within the recess.

6. The heater assembly and insulation as in claim 1 further comprising:

one or more tubes disposed in the recess.

7. A system comprising:

a heater;

a layer of insulation material, wherein the layer of insulation is configured to insulate the heater from an outside ambient;

one or more channels, wherein the plurality of channels are configured within a recess, wherein the recess is between an outer surface of the layer of insulation material and a protected shell of the heater assembly;

a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet; and

a restrictor assembly coupled to the plurality of channels, wherein the restrictor assembly is configured to adjustably change the flow rate of the plurality of channels.

8. A system as in claim 7 further comprising:

a quartz tubes, wherein the heater is disposed outside the quartz tube.

9. A system as in claim 7 further comprising:

the plurality of channels comprises straight lines or curved lines passing along the length of the recess.

10. A system as in claim 7 further comprising:

a locking assembly coupled to the restrictor assembly, wherein the locking assembly is configured to fixedly couple the restrictor assembly to the recess.

11. A system as in claim 7 further comprising:

a controller assembly coupled to the restrictor assembly, wherein the controller assembly is configured to automatically adjust the flow rate of the plurality of channels.

12. A system as in claim 7 further comprising:

a blower assembly coupled to the inlet of the manifold.

13. A heater assembly and insulation, comprising:

a layer of insulation material, wherein the layer of insulation is configured to insulate a heater element from an outside ambient;

one or more channels, wherein the plurality of channels are configured within a recess, wherein the recess is between an outer surface of the layer of insulation material and a protected shell of the heater assembly;

a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet;

a controller assembly coupled to a restrictor assembly, and

wherein the controller assembly is configured to automatically adjust the flow rate of the plurality of channels.

Continuity (2)
Continuation 13602322 · Sep 4, 2012
Related Publication 20160042983A1 · Feb 11, 2016