Printed interconnects for semiconductor packages
A method forming a packaged semiconductor device includes providing a first semiconductor die (first die) having bond pads thereon mounted face-up on a package substrate or on a die pad of a lead frame (substrate), wherein the substrate includes terminals or contact pads (substrate pads). A first dielectric layer is formed including printing a first dielectric precursor layer including a first ink having a first liquid carrier solvent extending from the substrate pads to the bond pads. A first interconnect precursor layer is printed including a second ink having a second liquid carrier over the first dielectric layer extending from the substrate pads to the bond pads. Sintering or curing the first interconnect precursor layer removes at least the second liquid carrier to form an electrically conductive interconnect including an ink residue which connects respective substrate pads to respective bond pads.
1. A method of forming packaged semiconductor devices, comprising:
providing a first semiconductor die having bond pads thereon mounted face up on a package substrate or on a die pad of a lead frame substrate, wherein said substrate includes substrate pads in a form of terminals or contact pads;
forming a first dielectric layer comprising printing a first dielectric precursor layer comprising a first ink including a first liquid carrier extending from said substrate pads to said bond pads respectively;
printing a first interconnect precursor layer comprising a second ink including a second liquid carrier over said first dielectric layer or said first dielectric precursor layer extending from said substrate pads to said bond pads respectively, and
sintering or curing said first interconnect precursor layer to remove at least said second liquid carrier to form a first electrically conductive interconnect comprising an ink residue which connects respective ones of said substrate pads to respective ones of said bond pads.
2. The method of claim 1 , further comprising:
forming a second dielectric layer comprising printing a second dielectric precursor layer comprising a third ink including a third liquid carrier on said first electrically conductive interconnect then sintering or curing, and
printing a second interconnect precursor layer (second interconnect precursor layer) comprising a fourth ink including a fourth liquid carrier over said second dielectric layer then sintering or curing to form a second electrically conductive interconnect so that a multi-level conductor interconnect which connects said substrate pads to said bond pads respectively is provided.
3. The method of claim 2 , wherein said multi-level conductor interconnect comprises microstrip, stripline, or slotline waveguide.
4. The method of claim 1 , wherein said second ink comprises a metal ink including a plurality of metal particles.
5. The method of claim 1 , wherein said second ink comprises an electrically conductive polymer or a doped semiconductor.
6. The method of claim 1 , wherein said substrate includes an inset region, and wherein said method further comprises mounting said first semiconductor die within said inset region.
7. The method of claim 1 , wherein said ink residue has a porosity of at least 20% in at least a portion thereof.