Semiconductor devices and methods of manufacturing the same, and semiconductor packages including the semiconductor devices
A semiconductor device includes a substrate having a die region and a scribe region surrounding the die region, a plurality of via structures penetrating through the substrate in the die region, a portion of the via structure being exposed over a surface of the substrate, and a protection layer pattern structure provided on the surface of the substrate surrounding a sidewall of the exposed portion of the via structure and having a protruding portion covering at least a portion of the scribe region adjacent to the via structure.
1. A semiconductor device, comprising:
a substrate including a die region and a scribe region surrounding the die region;
a plurality of via structures penetrating through the substrate in the die region, a portion of the via structure being exposed over a surface of the substrate; and
a protection layer pattern structure on the surface of the substrate surrounding a sidewall of the exposed portion of the via structure and having a protruding portion covering at least a portion of the scribe region adjacent to the via structure.
2. The semiconductor device of claim 1 , wherein the protection layer pattern structure has a scribe lane recess along the scribe region of the substrate.
3. The semiconductor device of claim 2 , wherein the protruding portion has a width substantially the same as a width of the scribe lane recess.
4. The semiconductor device of claim 2 , wherein the protruding portion protrudes in a first direction from the via structure and the scribe lane recess extends in a second direction substantially perpendicular to the first direction.
5. The semiconductor device of claim 1 , wherein the protruding portion protrudes in a first direction from the via structure and the protruding portion is spaced apart from the outermost via structure by a distance less than or equal to ten times the diameter of the via structure.
6. The semiconductor device of claim 5 , wherein the protruding portion extends in a second direction substantially perpendicular to the first direction by a distance of at least the diameter of the via structure.
7. The semiconductor device of claim 1 , wherein the protection layer pattern structure includes a plurality of the protruding portions and the protruding portions are spaced apart from each other along the scribe region.
8. The semiconductor device of claim 1 , wherein the protection layer pattern structure comprises a nitride layer pattern and an oxide layer pattern sequentially stacked on the surface of the substrate.
9. The semiconductor device of claim 1 , wherein the protection layer pattern structure comprises a photosensitive organic insulating material.
10. The semiconductor device of claim 1 , wherein the via structure comprises a via electrode.
11. The semiconductor device of claim 1 , further comprising a pad structure making contact with a top surface of the exposed portion of the via structure.
12. The semiconductor device of claim 1 , wherein a plurality of the via structures are arranged in one direction along a middle region or a peripheral region of the substrate.
13. A semiconductor device, comprising:
a substrate having a first surface and a second surface opposite to the first surface;
a plurality of via structures penetrating through the substrate, a portion of the via structure being exposed over the first surface of the substrate; and
a protection layer pattern structure provided on the first surface of the substrate, the protection layer pattern surrounding a sidewall of the exposed portion of the via structure and having a scribe lane recess along at least one of edges of the substrate and a protruding portion covering a portion of the edge of substrate adjacent to the via structure.
14. The semiconductor device of claim 13 , wherein the protruding portion has a width substantially the same as a width of the scribe lane recess.
15. The semiconductor device of claim 13 , wherein the protruding portion protrudes in a first direction from the via structure and the scribe lane recess extends in a second direction substantially perpendicular to the first direction.
16. The semiconductor device of claim 13 , wherein the protruding portion protrudes in a first direction from the via structure and the protruding portion is spaced apart from the outermost via structure by a distance less than or equal to ten times the diameter of the via structure.
17. The semiconductor device of claim 13 , wherein the protruding portion extends in a second direction substantially perpendicular to the first direction by a distance of at least the diameter of the via structure.
18. A semiconductor device, comprising:
a substrate including a die region and a scribe region surrounding the die region;
a plurality of via structures penetrating through the substrate in the die region, a portion of the via structure projecting through the substrate to be exposed beyond a surface of the substrate; and
a protection layer pattern structure on the surface of the substrate surrounding a sidewall of the exposed portion of the via structure extending into the scribe region adjacent to the via structure substantially the width of the scribe region and extending in a direction perpendicular to that, in the direction of the scribe region, beyond the via structure without filling the entire scribe region.
19. The semiconductor device of claim 18 , wherein the extended portion of the protection layer pattern begins at the edge of the scribe region spaced apart from the outermost edge of the outermost via in the via structure by a distance less than or equal to ten times the diameter of the via structure.
20. The semiconductor device of claim 18 , wherein the via structure comprises a via electrode.