Semiconductor device and method of fabricating the same
A method of fabricating a semiconductor device includes preparing a substrate including a first region and a second region, sequentially forming a first semiconductor layer and a second semiconductor layer on the first and second regions, patterning the first and second semiconductor layers to form a lower semiconductor pattern and an upper semiconductor pattern on each of the first and second regions, selectively removing the lower semiconductor pattern on the second region to form a gap region, and forming gate electrodes at the first and second regions, respectively.
1. A method of fabricating a semiconductor device, comprising:
preparing a substrate including a first region and a second region;
sequentially forming a first semiconductor layer and a second semiconductor layer on the first and second regions;
patterning the first and second semiconductor layers to form a lower semiconductor pattern and an upper semiconductor pattern on each of the first and second regions;
selectively removing the lower semiconductor pattern on the second region to form a gap region; and
forming gate electrodes at the first and second regions, respectively,
wherein the substrate includes a semiconductor layer, and
wherein a top surface of the semiconductor layer is exposed in the second region during the selectively removing of the lower semiconductor pattern.
2. The method of claim 1 , wherein the first and second semiconductor layers are formed by an epitaxial process using the substrate as a seed layer.
3. The method of claim 1 , wherein the gate electrode at the second region is formed to extend into the gap region.
4. The method of claim 1 , wherein the forming of the gap region further comprises forming a mask pattern covering the first region.
5. The method of claim 1 , further comprising, after the forming the gap region, performing a surface treatment process in such a way that the upper semiconductor pattern on the second region has a rounded surface.
6. The method of claim 1 , wherein the forming of the first and second semiconductor layers is part of a process that includes alternatingly and repeatedly forming a plurality of first semiconductor layers and a plurality of second semiconductor layers.
7. The method of claim 6 , wherein the gap region is part of a plurality of gap regions, each of which is formed between a corresponding pair of second semiconductor patterns formed by patterning the second semiconductor layers at the second region.
8. The method of claim 1 , wherein the first semiconductor layer is formed thicker than the second semiconductor layer.
9. A method of fabricating a semiconductor device, comprising:
preparing a substrate including a first region and a second region;
sequentially forming a first semiconductor layer and a second semiconductor layer on the first and second regions;
patterning the first and second semiconductor layers to form a lower semiconductor pattern and an upper semiconductor pattern on each of the first and second regions;
selectively removing the lower semiconductor pattern on the second region to form a gap region; and
forming gate electrodes at the first and second regions, respectively,
wherein a width of the upper semiconductor pattern is greater at the first region than at the second region, and
the lower semiconductor pattern at the first region is partially removed during the forming of the gap region, thereby having a width smaller than the upper semiconductor pattern at the first region.
10. A method of fabricating a semiconductor device, comprising:
preparing a substrate including a first region and a second region;
sequentially forming a first semiconductor layer and a second semiconductor layer on the first and second regions;
patterning the first and second semiconductor layers to form a lower semiconductor pattern and an upper semiconductor pattern on each of the first and second regions;
selectively removing the lower semiconductor pattern on the second region to form a gap region;
forming gate electrodes at the first and second regions, respectively;
forming an interlayered insulating layer covering sidewalls of both end portions of the lower semiconductor pattern on the second region,
wherein after the forming of the gap region, both end portions of the lower semiconductor pattern on the second region remain, and
wherein the interlayered insulating layer includes a recess region therein, and the gate electrode is formed in the recess region.
11. The method of claim 10 , wherein the first and second semiconductor layers are formed by an epitaxial process using the substrate as a seed layer.
12. The method of claim 10 , wherein the gate electrode at the second region is formed to extend into the gap region.
13. The method of claim 10 , wherein the forming of the gap region further comprises forming a mask pattern covering the first region.
14. The method of claim 10 , further comprising, after the forming the gap region, performing a surface treatment process in such a way that the upper semiconductor pattern on the second region has a rounded surface.
15. The method of claim 10 , wherein the forming of the first and second semiconductor layers is part of a process that includes alternatingly and repeatedly forming a plurality of first semiconductor layers and a plurality of second semiconductor layers.
16. The method of claim 15 , wherein the gap region is part of a plurality of gap regions, each of which is formed between a corresponding pair of second semiconductor patterns formed by patterning the second semiconductor layers at the second region.
17. The method of claim 10 , wherein a width of the upper semiconductor pattern is greater at the first region than at the second region, and
the lower semiconductor pattern at the first region is partially removed during the forming of the gap region, thereby having a width smaller than the upper semiconductor pattern at the first region.