Substrate heat treatment apparatus, method of installing substrate heat treatment apparatus

1. A substrate heat treatment apparatus, comprising:

a conveyance storage unit including a first storage section and a second storage section each configured to store a plurality of conveyance containers, and a conveyance mechanism provided within the conveyance storage unit to be extended in a vertical direction and configured to convey the conveyance containers while moving in the vertical direction and being rotated, each of the conveyance containers being configured to accommodate a plurality of wafers;

a carry-in/out unit provided to be attached to the conveyance storage unit from one side of the conveyance storage unit and configured to dispose the conveyance containers such that the conveyance containers are carried into or out of the conveyance storage unit by the conveyance mechanism;

a heat treatment unit provided to be attached to the conveyance storage unit from another side of the conveyance storage unit opposite to the one side and including a heat treatment furnace configured to accommodate a holder configured to hold the plurality of wafers in multiple stages, and to perform the heat treatment on the wafers; and

a transfer section including a mounting stage disposed in a wall of the conveyance storage unit facing the heat treatment unit and below the first storage section, the mounting stage being configured to mount each of the conveyance containers thereon to allow the wafers in each of the conveyance containers to be transferred to the holder of the heat treatment unit,

wherein the first storage section of the conveyance storage unit is disposed in the wall of the conveyance storage unit facing the heat treatment unit, and the second storage section is disposed below the conveyance mechanism and adjacent to the mounting stage, and

the second storage section includes an elevating mechanism configured to change a height of each of the conveyance containers stored in the second storage section in the vertical direction.

2. The substrate heat treatment apparatus of claim 1 , wherein the elevating mechanism includes:

a conveyance container support configured to support the conveyance containers;

a position displacement member configured to displace a vertical position of the conveyance container support; and

a guide member configured to guide a vertical movement of the conveyance container support.

3. The substrate heat treatment apparatus of claim 2 , wherein the position displacement member includes a ball screw.

4. The substrate heat treatment apparatus of claim 1 , wherein

the elevating mechanism includes a conveyance container support configured to support the conveyance containers, and

a distance between the conveyance container support and a lower end surface of the elevating mechanism when the conveyance container support is located at a highest position is 1.2 or more times a distance between the conveyance container support and the lower end surface of the elevating mechanism when the conveyance container support is located at a lowest position.

5. The substrate heat treatment apparatus of claim 1 , wherein the elevating mechanism is configured to elevate a load of 50 kg or more.

6. The substrate heat treatment apparatus of claim 1 , wherein the conveyance mechanism is configured to hold the conveyance containers from a top side thereof to convey the conveyance containers.

7. The substrate heat treatment apparatus of claim 1 ,

wherein the carry-in/out unit includes: a first carry-in/out table and a second carry-in/out table disposed above the first carry-in/out table, the conveyance containers being mounted on the first carry-in/out table to be carried into or out of the substrate heat treatment apparatus, and the conveyance containers being mounted on the second carry-in/out table to be carried into or out of the substrate heat treatment apparatus, and

a distance between a conveyance container mounting surface of the first carry-in/out table and a lower end face of the conveyance storage unit is 890 mm or more.

8. The substrate heat treatment apparatus of claim 1 , wherein

the conveyance storage unit includes a housing including a first housing portion in which the first storage section and the conveyance mechanism are disposed, and a second housing portion below the first housing portion in which the second storage section is disposed, and

the housing of the conveyance storage unit is configured to be divided into at least the first housing portion and the second housing portion.

9. The substrate heat treatment apparatus of claim 1 , wherein the first storage section includes a plurality of stages of mounting shelves.

10. The substrate heat treatment apparatus of claim 9 , wherein the conveyance mechanism is extended along the plurality of stages of mounting shelves all the way.

11. The substrate heat treatment apparatus of claim 1 , wherein the first storage section is arranged on a wall portion of the conveyance storage unit facing the heat treatment unit.

12. A method of installing the substrate heat treatment apparatus of claim 8 , the method comprising:

forming a recess on a base surface;

installing the second housing portion within the recess; and

installing the first housing portion above the second housing portion.