IP Library Granted Patent US 9,716,169
Granted Patent B2
US 9,716,169 · App. 14/902,261 · Granted Jul 25, 2017

Lateral double diffused metal oxide semiconductor field-effect transistor

Inventors: Feng Huang (Jiangsu, CN); Guipeng Sun (Jiangsu, CN); Guangtao Han (Jiangsu, CN)
Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
H01L29/7816H01L29/0649H01L29/0653H01L29/0865H01L29/0882H01L29/1095H01L29/4238H01L29/66659H01L29/7835H01L29/1045H01L29/402
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Quick Facts
Patent No.
US 9,716,169
App. No.
14/902,261
Granted
Jul 25, 2017
Kind
B2
Abstract

A lateral double diffused metal oxide semiconductor field-effect transistor includes semiconductor substrates, body regions positioned in the semiconductor substrates, drift regions positioned in the semiconductor substrates, source regions and a body leading-out region which are positioned in the body regions and spaced from the drift regions, a field region and drain regions which are positioned in the drift regions, and gates positioned on the surfaces of the semiconductor substrates to partially cover the body regions, the drift regions and the field region, wherein the field region is of a finger-like structure and comprises a plurality of strip field regions which extend from the source regions to the drain regions and are isolated by the active regions; and the strip field regions provided with strip gate extending regions extending from the gates.

Claims (25)

1. A lateral double diffused metal oxide semiconductor field-effect transistor, comprising:

a semiconductor substrate;

a body region positioned in the semiconductor substrate;

a drift region positioned in the semiconductor substrate;

a source region and a body leading-out region positioned in the body region and spaced from the drift region;

a field region and a drain region in the drift region; and

a gate positioned on the semiconductor substrate and covering partial the body region, the drift region, and the field region;

wherein the field region comprises a plurality of parallel spaced strip shaped field regions extending from the source region to the drain region, and the plurality of strip shaped field regions are isolated by an active region.

2. A lateral double diffused metal oxide semiconductor field-effect transistor, comprising:

a semiconductor substrate;

a body region positioned in the semiconductor substrate;

a drift region positioned in the semiconductor substrate;

a source region and a body leading-out region positioned in the body region and spaced from the drift region;

a field region and a drain region in the drift region; and

a gate positioned on the semiconductor substrate and covering partial the body region, the drift region, and the field region;

wherein the field region is a plurality of parallel spaced strip shaped field regions extending from the source region to the drain region, and the plurality of strip shaped field regions are isolated by an active region;

wherein the gate comprises a plate-like portion adjacent to the source region and a plurality of strip shaped portions positioned on the strip shaped field regions.

3. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 2 , wherein the plurality of strip shaped portions of the gate extends from the plate-like portion of the gate to the strip shaped portion regions.

4. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 2 , wherein a width of the strip shaped portion of the gate is less than a width of the strip shaped field region.

5. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 2 , wherein the strip shaped portions of the gate deplete the drift region.

6. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 1 , wherein the field region is a STI or FOX.

7. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 1 , wherein the body region is a well region.

8. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 7 , wherein the body leaning region is a portion of the well region implanted with additional impurities.

9. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 2 , wherein the body region is a well region.

10. The lateral double diffused metal oxide semiconductor field-effect transistor according to claim 9 , wherein the body leaning region is a portion of the well region implanted with additional impurities.

Assignments (2)
MERGER Recorded Apr 29, 2019
From: CSMC TECHNOLOGIES FAB1 CO., LTD.
To: CSMC TECHNOLOGIES FAB2 CO., LTD.
Reel/Frame 049018/0616 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 31, 2015
From: HUANG, FENG; SUN, GUIPENG; HAN, GUANGTAO
To: CSMC TECHONLOGIES FAB1 CO., LTD.
Reel/Frame 037390/0549 →
Priority Claims (1)
CN 2013 1 0358585 · Aug 15, 2013 · national
Continuity (1)
Related Publication 20160372591A1 · Dec 22, 2016