IP Library › Granted Patent US 9,722,177
Granted Patent B2
US 9,722,177 · App. 14/736,858 · Granted Aug 1, 2017

Resistive random access memory device with a solid electrolyte including a region made of a first metal oxide and doped by a second element distinct from the first metal

Inventors: Gabriel Molas (Grenoble, FR); Philippe Blaise (Grenoble, FR); Faiz Dahmani (La Varenne Saint-Hilaire, FR); Elisa Vianello (Grenoble, FR)
Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
H01L45/08G11C13/0011H01L45/085H01L45/1233H01L45/1253H01L45/1266H01L45/146
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Quick Facts
Patent No.
US 9,722,177
App. No.
14/736,858
Granted
Aug 1, 2017
Kind
B2
Abstract

A resistive random access memory device includes a first electrode made of inert material; a second electrode made of soluble material; a solid electrolyte including a region made of an oxide of a first metal element, referred to as first metal oxide doped by a second element, distinct from the first metal and able to form a second oxide, the second element being selected such that the band gap energy of the second oxide is strictly greater than the band gap energy of the first metal oxide, the atomic percentage of the second element within the region of the solid electrolyte being comprised between 5% and 20%.

Claims (37)

1. A Resistive random access memory device comprising:

a first electrode made of inert material;

a second electrode made of soluble material, and

a solid electrolyte, the first and second electrodes being respectively in contact with one of the faces of the solid electrolyte on either side of the solid electrolyte, the second electrode being configured to supply mobile ions circulating in the solid electrolyte to the first electrode to form a conductive filament between the first and second electrodes when a voltage is applied between the first and second electrodes,

wherein the solid electrolyte comprises a region made of an oxide of a first metal element that forms a first metal oxide, and wherein the region is doped by a second element, distinct from the first metal and able to form a second oxide, the second element being selected such that a band gap energy of the second oxide is strictly greater than the band gap energy of the first metal oxide, an atomic percentage of the second element within the region of the solid electrolyte being comprised between 5% and 20%, and

wherein the second element is selected such that an electrical permittivity of the material of the doped region is less than or equal to the electrical permittivity of the first metal oxide.

2. The device according to claim 1 , wherein the second element is a metal distinct from the first metal and able to form a second metal oxide.

3. The device according to claim 1 , wherein the atomic percentage of the second element within the region of the solid electrolyte is substantially equal to 10%.

4. The device according to claim 1 , wherein the first metal oxide is gadolinium oxide and wherein the second element is aluminium.

5. The device according to claim 1 , wherein the solid electrolyte comprises:

a first sub-layer in contact with the first electrode made of inert material, and

a second sub-layer in contact with the second electrode made of soluble material;

the region of the solid electrolyte made of the first metal oxide doped by the second element being a central sub-layer comprised between the first and second sub-layers.

6. The device according to claim 1 , wherein the solid electrolyte comprises:

a first sub-layer in contact with the first electrode made of inert material;

a second sub-layer in contact with the second electrode made of soluble material, and

a central sub-layer comprised between the first and second sub-layers,

the region of the solid electrolyte made of first metal oxide doped by the second element being the first sub-layer and/or the second sub-layer.

7. The device according to claim 1 , wherein the solid electrolyte is entirely formed by the region made of the first metal oxide doped by the second element.

8. A Resistive random access memory device comprising:

a first electrode made of inert material;

a second electrode made of soluble material, and

a solid electrolyte, the first and second electrodes being respectively in contact with one of the faces of the solid electrolyte on either side of the solid electrolyte, the second electrode being configured to supply mobile ions circulating in the solid electrolyte to the first electrode to form a conductive filament between the first and second electrodes when a voltage is applied between the first and second electrodes,

wherein the solid electrolyte comprises a region made of an oxide of a first metal element that forms a first metal oxide, and wherein the region is doped by a second element, distinct from the first metal and able to form a second oxide, the second element being selected such that a band gap energy of the second oxide is strictly greater than the band gap energy of the first metal oxide, an atomic percentage of the second element within the region of the solid electrolyte being comprised between 5% and 20%, and

wherein the second element is selected such that an electrical permittivity of the second oxide is strictly less than the electrical permittivity of the first metal oxide.

9. A Resistive random access memory device comprising:

a first electrode made of inert material;

a second electrode made of soluble material, and

a solid electrolyte, the first and second electrodes being respectively in contact with one of the faces of the solid electrolyte on either side of the solid electrolyte, the second electrode being configured to supply mobile ions circulating in the solid electrolyte to the first electrode to form a conductive filament between the first and second electrodes when a voltage is applied between the first and second electrodes,

wherein the solid electrolyte comprises a region made of an oxide of a first metal element that forms a first metal oxide, and wherein the region is doped by a second element, distinct from the first metal and able to form a second oxide, the second element being selected such that a band gap energy of the second oxide is strictly greater than the band gap energy of the first metal oxide, an atomic percentage of the second element within the region of the solid electrolyte being comprised between 5% and 20%, and

wherein the second element is selected such that the first metal oxide doped by the second element has a band gap energy substantially equal to the band gap energy of the first metal oxide not doped by the second element.

10. A Resistive random access memory device comprising:

a first electrode made of inert material;

a second electrode made of soluble material, and

a solid electrolyte, the first and second electrodes being respectively in contact with one of the faces of the solid electrolyte on either side of the solid electrolyte, the second electrode being configured to supply mobile ions circulating in the solid electrolyte to the first electrode to form a conductive filament between the first and second electrodes when a voltage is applied between the first and second electrodes,

wherein the solid electrolyte comprises a region made of an oxide of a first metal element that forms a first metal oxide, and wherein the region is doped by a second element, distinct from the first metal and able to form a second oxide, the second element being selected such that a band gap energy of the second oxide is strictly greater than the band gap energy of the first metal oxide, an atomic percentage of the second element within the region of the solid electrolyte being comprised between 5% and 20%, and

wherein the second element is selected such that a length of a bond between the second element and oxygen is less than the length of the bond between the first metal element and oxygen.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2015
From: MOLAS, GABRIEL; BLAISE, PHILIPPE; VIANELLO, ELISA
To: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Reel/Frame 036096/0713 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2015
From: DAHMANI, FAIZ
To: ALTIS SEMICONDUCTOR
Reel/Frame 036096/0812 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2015
From: ALTIS SEMICONDUCTOR
To: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Reel/Frame 036096/0914 →
Priority Claims (1)
FR 14 55286 · Jun 11, 2014 · national
Continuity (1)
Related Publication 20150364679A1 · Dec 17, 2015