Solid-state imaging device and electronic apparatus
The present disclosure relates to a solid-state imaging device, an electronic apparatus, and a manufacturing method that are designed to further increase conversion efficiency. A solid-state imaging device includes a pixel in which element separation is realized by a first trench element separation region having a trench structure in a region between an FD unit and an amplifying transistor among element separation elements separating the elements constituting the pixel from one another, and a second trench element separation region having a trench structure in a region other than the region between the FD unit and the amplifying transistor among the element separation regions separating the elements constituting the pixel from one another, and the first trench element separation region is deeper than the second trench element separation region. The present technology can be applied to CMOS image sensors, for example.
1. A solid-state imaging device comprising:
a pixel including elements including at least:
a photoelectric conversion unit configured to convert light into charge;
a transfer transistor configured to transfer the charge generated at the photoelectric conversion unit;
a floating diffusion region configured to temporarily accumulate the charge generated at the photoelectric conversion unit; and
an amplifying transistor configured to amplify the charge accumulated in the floating diffusion region, and output a pixel signal at a level corresponding to the charge;
a reset transistor configured to release the charge accumulated in the floating diffusion region;
a separation transistor provided between the floating diffusion region and the reset transistor; and
a second floating diffusion region provided at a connecting portion between the reset transistor and the separation transistor,
wherein, in the pixel, element separation is realized by a first trench element separation region having a trench structure in a region between the floating diffusion region and the amplifying transistor among element separation regions separating elements constituting the pixel from one another, and a second trench element separation region having a trench structure in a region other than the region between the floating diffusion region and the amplifying transistor among the element separation regions separating the elements constituting the pixel from one another, wherein the first trench element separation region is deeper than the second trench element separation region, and wherein the first trench element separation region realizes element separation of the second floating diffusion region.
2. The solid-state imaging device according to claim 1 , wherein the first trench element separation region realizes element separation between the transfer transistor and the floating diffusion region.
3. A solid-state imaging device comprising:
a pixel including elements including at least:
a photoelectric conversion unit configured to convert light into charge;
a transfer transistor configured to transfer the charge generated at the photoelectric conversion unit;
a floating diffusion region configured to temporarily accumulate the charge generated at the photoelectric conversion unit; and
an amplifying transistor configured to amplify the charge accumulated in the floating diffusion region, and output a pixel signal at a level corresponding to the charge,
wherein, in the pixel, element separation is realized by a first trench element separation region having a trench structure in a region between the floating diffusion region and the amplifying transistor among element separation regions separating elements constituting the pixel from one another, and a second trench element separation region having a trench structure in a region other than the region between the floating diffusion region and the amplifying transistor among the element separation regions separating the elements constituting the pixel from one another, wherein the first trench element separation region is deeper than the second trench element separation region, and wherein a contact portion connecting the floating diffusion region to an interconnect has a smaller diameter than contact portions connecting the interconnect to the other elements constituting the pixel.
4. The solid-state imaging device according to claim 3 , wherein the first trench element separation region realizes element separation between the transfer transistor and the floating diffusion region.
5. An electronic apparatus comprising a solid-state imaging device,
the solid-state imaging device comprising:
a pixel including elements including at least:
a photoelectric conversion unit configured to convert light into charge;
a transfer transistor configured to transfer the charge generated at the photoelectric conversion unit;
a floating diffusion region configured to temporarily accumulate the charge generated at the photoelectric conversion unit;
an amplifying transistor configured to amplify the charge accumulated in the floating diffusion region, and output a pixel signal at a level corresponding to the charge;
a reset transistor configured to release the charge accumulated in the floating diffusion region;
a separation transistor provided between the floating diffusion region and the reset transistor; and
a second floating diffusion region provided at a connecting portion between the reset transistor and the separation transistor,
wherein, in the pixel, element separation is realized by a first trench element separation region having a trench structure in a region between the floating diffusion region and the amplifying transistor among element separation regions separating elements constituting the pixel from one another, and a second trench element separation region having a trench structure in a region other than the region between the floating diffusion region and the amplifying transistor among the element separation regions separating the elements constituting the pixel from one another, wherein the first trench element separation region is deeper than the second trench element separation region, and wherein the first trench element separation region realizes element separation of the second floating diffusion region.