Hybrid substrate engineering in CMOS finFET integration for mobility improvement
A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device includes orienting a semiconductor layer of a semiconductor-on-insulator (SOI) substrate with a base substrate of the SOI, exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench and forming spacers on sidewalls of the trench. The base substrate is epitaxially grown from a bottom of the trench to form an extended region. A fin material is epitaxially grown from the extended region within the trench. The mask layer and the dielectric layer are restored over the trench. P-type field-effect transistor (PFET) fins are etched on the base substrate, and N-type field-effect transistor (NFET) fins are etched in the semiconductor layer.
1. A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device, comprising:
orienting a semiconductor layer of a semiconductor-on- insulator (SOI) substrate with a base substrate of the SOI;
exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench;
forming spacers on sidewalls of the trench;
epitaxially growing the base substrate from a bottom of the trench to form an extended region;
epitaxially growing a fin material from the extended region within the trench;
restoring the mask layer and the dielectric layer over the trench;
etching p-type field-effect transistor (PFET) fins on the base substrate and N-type field-effect transistor (NFET) fins in the semiconductor layer; and
overetching the fins into the buried dielectric and the extended region using an etch chemistry configured to protect material of the semiconductor layer during etching.
2. The method as recited in claim 1 , wherein the semiconductor layer and the base substrate include monocrystalline silicon and orienting the semiconductor layer with the base substrate includes aligning device channels for the semiconductor layer and the base substrate.
3. The method as recited in claim 2 , wherein the semiconductor layer includes a (100) wafer and the base substrate includes a (110) wafer and the device channels for the semiconductor layer and the base substrate are in a <110> direction.
4. The method as recited in claim 1 , wherein epitaxially growing the fin material from the extended region within the trench includes epitaxially growing SiGe material from the extended region.
5. The method as recited in claim 1 , further comprising forming fin spacers on the fins and overetching the fins into the extended region to form pedestals in the base substrate.
6. The method as recited in claim 1 , wherein etching includes employing a spacer image transfer (SIT) process.
7. The method as recited in claim 1 , further comprising growing rectangular-shaped source and drain regions on the fins.
8. The method as recited in claim 1 , wherein the extended region is extended to a height of the buried dielectric.
9. The method as recited in claim 1 , wherein the fin material is extended to a height of the semiconductor layer.
10. A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device, comprising:
orienting a silicon layer of a semiconductor-on-insulator (SOI) substrate with a silicon base substrate of the SOI by aligning device channels for the silicon layer and the base substrate, wherein the silicon layer includes a (100) wafer and the base substrate includes a (110) wafer and the device channels for the semiconductor layer and the base substrate are in a <110> direction;
exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench;
forming spacers on sidewalls of the trench;
epitaxially growing the base substrate from a bottom of the trench to form an extended region;
epitaxially growing SiGe from the extended region within the trench;
restoring the mask layer and the dielectric layer over the trench;
etching p-type field-effect transistor (PFET) fins on the base substrate and N-type field-effect transistor (NFET) fins in the silicon layer; and
overetching the fins into the buried dielectric and the extended region using an etch chemistry configured to protect material of the silicon layer during etching.
11. The method as recited in claim 10 , further comprising foaming fin spacers on the fins and overetching the fins into the extended region to form pedestals in the base substrate.
12. The method as recited in claim 10 , wherein etching includes employing a spacer image transfer (SIT) process.
13. The method as recited in claim 10 , further comprising growing rectangular-shaped source and drain regions on the fins.
14. The method as recited in claim 10 , wherein the extended region is extended to a height of the buried dielectric.
15. The method as recited in claim 10 , wherein the fin material is extended to a height of the silicon layer.
16. A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device, comprising:
orienting a semiconductor layer of a semiconductor-on- insulator (SOI) substrate with a base substrate of the SOI;
exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench;
forming spacers on sidewalls of the trench;
epitaxially growing the base substrate from a bottom of the trench to form an extended region;
epitaxially growing a fin material from the extended region within the trench;
restoring the mask layer and the dielectric layer over the trench;
etching p-type field-effect transistor (PFET) fins on the base substrate and N-type field- effect transistor (NFET) fins in the semiconductor layer; and
forming fin spacers on the fins and overetching the fins into the extended region to form pedestals in the base substrate.
17. The method as recited in claim 16 , wherein the semiconductor layer and the base substrate include monocrystalline silicon and orienting the semiconductor layer with the base substrate includes aligning device channels for the semiconductor layer and the base substrate.
18. The method as recited in claim 17 , wherein the semiconductor layer includes a (100) wafer and the base substrate includes a (110) wafer and the device channels for the semiconductor layer and the base substrate are in a <110> direction.
19. The method as recited in claim 16 , wherein epitaxially growing the fin material from the extended region within the trench includes epitaxially growing SiGe material from the extended region.
20. The method as recited in claim 16 , wherein etching PFET fins on the base substrate and NFET fins in the semiconductor layer includes overetching the fins into the buried dielectric and the extended region using an etch chemistry configured to protect material of the semiconductor layer during etching.