Visual feedback for process control in RTP chambers
Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.
1. A process chamber, comprising:
a chamber body;
a lamp array disposed in the chamber body;
a chamber lid disposed over the chamber body;
a probe disposed through an opening in the chamber lid, the probe having a wide-angle lens at a first end of the probe, the wide-angle lens having a viewing angle of about 160 degrees to about 170 degrees; and
an imaging device positioned to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.
2. The process chamber of claim 1 , wherein the wide-angle lens comprises a plurality of lenses separated by spacers.
3. The process chamber of claim 1 , wherein the probe comprises a housing and a spring positioned therein.
4. The process chamber of claim 1 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive the image from the imaging device.
5. The process chamber of claim 1 , wherein the lid includes cooling channels therein, the cooling channels in thermal communication with the probe.
6. A process chamber, comprising:
a chamber body;
a lamp array disposed in the chamber body;
a lid disposed over the chamber body;
a probe disposed through an opening in the chamber lid, the probe having a spring at a first end of the probe and a wide-angle lens at a second end of the probe, the wide-angle lens comprising a plurality of lenses separated by spacers and having a viewing angle of about 160 degrees to about 170 degrees; and
an imaging device to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.
7. The process chamber of claim 6 , wherein the lid includes cooling channels therein, the cooling channels in thermal communication with the probe.
8. The process chamber of claim 6 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive the image from the imaging device.
9. The process chamber of claim 8 , wherein the control unit facilitates comparison of the image to a reference image.
10. The process chamber of claim 9 , wherein the lamp array includes a plurality of zones.
11. The process of claim 10 , wherein the control unit is adapted to control power applied to each of the plurality of zones.
12. The process chamber of claim 9 , wherein the control unit is adapted to control power applied to each lamp of the lamp array.
13. A method for monitoring lamp performance in a process chamber, comprising:
a lamp array within the process chamber;
capturing an image of the lamp array within the process chamber using a wide-angle lens;
transferring the image to a control unit;
comparing the image to a reference image to determine if the lamp array is operating at a desired output; and
providing an indication that one or more lamps in the lamp array are not functioning.
14. The method of claim 13 , further comprising adjusting the power provided to the one or more lamps in the lamp array after the comparing the image to a reference image.
15. The method of claim 13 , further comprising elevating a pre-heat ring within the process chamber prior to the capturing an image.
16. The method of claim 13 , wherein a transparent substrate is located within the process chamber while capturing the image.
17. The method of claim 13 , further comprising:
elevating a pre-heat ring within the process chamber prior to the capturing an image.