Turbo-molecular pump
A turbo-molecular pump comprises: a rotor; stationary blades; a stator; a plurality of spacers; a heater disposed on the base; a temperature sensor for detecting a temperature of the stator; and a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature. At least one spacer arranged on a base side of the plurality of spacers is cooled by coolant, and the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base.
1. A turbo-molecular pump comprising:
a rotor having a plurality of stages of rotor blades and a cylindrical section;
a plurality of stages of stationary blades alternately arranged with respect to the plurality of stages of rotor blades;
a stator arranged with a gap from the cylindrical section;
a plurality of spacers stacked on a base to which the stator is fixed, and positioning the plurality of stages of stationary blades;
a heater disposed on the base;
a temperature sensor for detecting a temperature of the stator; and
a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature,
wherein at least one spacer included in and arranged on a base side of the plurality of spacers is cooled by coolant,
the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base side,
and
a coolant supply section and a coolant discharge section from a first coolant flow passage are arranged on a pump atmospheric side.
2. The turbo-molecular pump according to claim 1 , further comprising a base cooling section having a second coolant flow passage through which coolant flows, and cooling the base, wherein
the temperature regulation section controls ON/OFF of the heater and the amount of coolant supplied to the base cooling section based on a temperature detected by the temperature sensor to regulate the temperature of the stator.
3. The turbo-molecular pump according to claim 2 , further comprising a three-way valve to which the coolant discharge section of the first coolant flow passage, a coolant supply side of the second coolant flow passage, and a coolant pipe bypassing the second coolant flow passage are connected, switching inflow destination of coolant discharged from the coolant discharge section of the first coolant flow passage between the coolant supply side of the second coolant flow passage and the coolant pipe bypassing the second coolant flow passage, wherein
the temperature regulation section switches the three-way valve to the coolant pipe and turns ON the heater when a temperature detected by the temperature sensor is less than the reaction product accumulation prevention temperature, and
the temperature regulation section switches the three-way valve to the coolant supply side of the second coolant flow passage and turns OFF the heater when a temperature detected by the temperature sensor is equal to or more than the reaction product accumulation prevention temperature.
4. The turbo-molecular pump according to claim 1 , wherein
the spacer located nearest to the base of the plurality of spacers stacked on the base is cooled by coolant.
5. A turbo-molecular pump comprising:
a rotor having a plurality of stages of rotor blades and a cylindrical section;
a plurality of stages of stationary blades alternately arranged with respect to the plurality of stages of rotor blades;
a stator arranged with a gap from the cylindrical section;
a plurality of spacers stacked on a base to which the stator is fixed, and positioning the plurality of stages of stationary blades;
a heater disposed on the base;
a temperature sensor for detecting a temperature of the stator; and
a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature,
wherein at least one spacer included in and arranged on a base side of the plurality of spacers is cooled by coolant,
the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base side, and
the spacer located nearest to the base of the plurality of spacers stacked on the base is cooled by coolant,
the turbo-molecular pump further comprising a pump case fixed to the base with fixation bolts, the pump case holding the plurality of spacers stacked on the base between the pump case and the base, wherein
the heat insulation member is a heat insulation washer which is attached to the fixation bolts and arranged between the spacer cooled by the coolant and the base.
6. A turbo-molecular pump comprising:
a rotor having a plurality of stages of rotor blades and a cylindrical section;
a plurality of stages of stationary blades alternately arranged with respect to the plurality of stages of rotor blades;
a stator arranged with a gap from the cylindrical section; and
a plurality of spacers stacked on a base to which the stator is fixed, and positioning the plurality of stages of stationary blades;
wherein at least one spacer included in and arranged on a base side of the plurality of spacers is a cooling spacer cooled by coolant,
the cooling spacer includes a spacer section stacked together with the other spacers and a cooling section having a ring-like groove which houses a cooling pipe in which the coolant flows, and
the turbo-molecular pump further comprising the ring-like cooling pipe housed in the ring-like groove and including a coolant supply section and a coolant discharge section arranged on a pump atmospheric side.