Image sensors and methods of forming the same
An image sensor includes a substrate including a light-receiving region and a light-shielding region, a device isolation pattern in the substrate of the light-receiving region to define active pixels, and a device isolation region in the substrate of the light-shielding region to define reference pixels. An isolation technique of the device isolation pattern is different from that of the device isolation region.
1. An image sensor comprising:
a substrate including,
a light-receiving region, and
a light-shielding region;
a device isolation pattern in the light-receiving region of the substrate, the device isolation pattern configured to define active pixels; and
a device isolation region in the light-shielding region of the substrate, the device isolation region configured to define reference pixels, the device isolation pattern including a different material from a material of the device isolation region.
2. The image sensor of claim 1 , wherein the device isolation pattern includes an insulating material filling a trench in the substrate.
3. The image sensor of claim 2 , wherein the device isolation pattern comprises:
a first device isolation pattern in the light-receiving region; and
a second device isolation pattern between the reference pixels in the light-shielding region,
wherein a shape of the second device isolation pattern is different from a shape of the first device isolation pattern.
4. The image sensor of claim 1 , wherein the device isolation region is a dopant region, the dopant region including a portion of the substrate including dopants.
5. The image sensor of claim 1 , further comprising:
a photoelectric conversion part in the substrate of each of the active pixels and the reference pixels.
6. The image sensor of claim 5 , wherein structures of the photoelectric conversion parts in the reference pixels are the same as or symmetrical to those of the photoelectric conversion parts in the active pixels.
7. The image sensor of claim 1 , wherein the device isolation pattern includes a material having a refractive index lower than that of the substrate.
8. The image sensor of claim 1 , wherein the substrate further comprises: a dummy region between the light-receiving region and the light-shielding region,
the dummy region including a plurality of dummy pixels.
9. An image sensor comprising:
a substrate including active pixels and reference pixels,
the active pixels being defined by a device isolation pattern filling a trench formed in the substrate, and
the reference pixels being defined by a dopant region including a portion of the substrate including dopants.
10. The image sensor of claim 9 , further comprising:
photoelectric conversion parts in the substrate of the active pixels and the reference pixels, respectively.
11. The image sensor of claim 10 , wherein the photoelectric conversion parts are adjacent to a first surface of the substrate, and
wherein the trench extends from a second surface of the substrate into the substrate, and
wherein the second surface is opposite to the first surface.
12. The image sensor of claim 11 , further comprising:
a shallow device isolation layer in the substrate to define active regions,
wherein the shallow device isolation layer is adjacent to the first surface of the substrate.
13. The image sensor of claim 11 , further comprising:
transfer gates on the first surface of the substrate, the transfer gates on the photoelectric conversion parts, respectively;
an interconnection structure covering the transfer gates on the first surface of the substrate; and
a color filter and a micro-lens on the second surface of the substrate of each of the active pixels.
14. The image sensor of claim 10 , wherein the dopant region is doped with dopants of a first conductivity type, and
wherein the photoelectric conversion parts are doped with dopants of a second conductivity type different from the first conductivity type.
15. The image sensor of claim 9 , wherein the reference pixels have the same shape and the same area as the active pixels when viewed from a plan view.
16. The image sensor of claim 9 , further comprising:
a light-shielding pattern on the substrate to cover the reference pixels,
wherein the active pixels are exposed by the light-shielding pattern.
17. An image sensor comprising:
a substrate including,
a light-receiving region including a device isolation pattern, the device isolation pattern defining active pixels; and
a light-shielding region including a device isolation region, the device isolation region defining reference pixels;
wherein the device isolation pattern includes a different material than the device isolation region.
18. The image sensor of claim 17 , wherein the device isolation region includes dopants.
19. The image sensor of claim 17 , wherein the device isolation pattern includes an insulating material in a trench of the substrate.