Piezoelectric material, piezoelectric element, and electronic apparatus
Provided is a lead-free piezoelectric material having satisfactory piezoelectric constant and mechanical quality factor in a device driving temperature range (−30° C. to 50° C.) The piezoelectric material includes a main component containing a perovskite-type metal oxide represented by Formula 1, a first auxiliary component composed of Mn, and a second auxiliary component composed of Bi or Bi and Li. The content of Mn is 0.040 parts by weight or more and 0.500 parts by weight or less based on 100 parts by weight of the metal oxide on a metal basis. The content of Bi is 0.042 parts by weight or more and 0.850 parts by weight or less and the content of Li is 0.028 parts by weight or less (including 0 parts by weight) based on 100 parts by weight of the metal oxide on a metal basis. (Ba 1-x Ca x ) a (Ti 1-y Zr y )O 3 . . . (1), wherein, 0.030≦x<0.090, 0.030≦y≦0.080, and 0.9860≦a≦1.0200.
1. A piezoelectric material comprising:
a main component containing a perovskite-type metal oxide represented by Formula 1, a first auxiliary component composed of Mn, and a second auxiliary component composed of Bi or Bi and Li, wherein
the content of Mn is 0.040 parts by weight or more and 0.500 parts by weight or less based on 100 parts by weight of the metal oxide on a metal basis; and the content of Bi is 0.042 parts by weight or more and 0.850 parts by weight or less and the content of Li is 0.028 parts by weight or less (including 0 parts by weight) based on 100 parts by weight of the metal oxide on a metal basis,
(Ba 1-x Ca x ) a (Ti 1-y Zr y )O 3 . . . (1), wherein, 0.030≦x<0.090, 0.030≦y≦0.080, and 0.9860≦a≦1.0200.
2. The piezoelectric material according to claim 1 , further comprising a third auxiliary component composed of Mg, wherein
the content of the third auxiliary component is 0.10 parts by weight or less (excluding 0 parts by weight) based on 100 parts by weight of the perovskite-type metal oxide represented by Formula 1 on a metal basis.
3. The piezoelectric material according to claim 1 , further comprising a fourth auxiliary component composed of at least one of Si and B, wherein
the content of the fourth auxiliary component is 0.001 parts by weight or more and 4.000 parts by weight or less based on 100 parts by weight of the perovskite-type metal oxide represented by Formula 1 on a metal basis.
4. The piezoelectric material according to claim 1 , wherein the crystal grains constituting the piezoelectric material have an average equivalent circular diameter of 500 nm or more and 10 μm or less.
5. The piezoelectric material according to claim 1 , having a relative density of 93% or more and 100% or less.
6. The piezoelectric material according to claim 1 , having a dielectric loss of 0.006 or less at a frequency of 1 kHz.
7. A piezoelectric element at least comprising:
a first electrode,
a piezoelectric material part, and
a second electrode,
wherein the piezoelectric material constituting the piezoelectric material part is the piezoelectric material according to claim 1 .
8. A multilayered piezoelectric element comprising alternately laminated piezoelectric material layers and electrode layers each including an internal electrode, wherein the piezoelectric material layers are made of the piezoelectric material according to claim 1 .
9. The multilayered piezoelectric element according to claim 8 , wherein the internal electrode contains Ag and Pd such that the weight ratio M 1 /M 2 of the content M 1 of Ag to the content M 2 of Pd is 0.25≦M 1 /M 2 ≦4.0.
10. The multilayered piezoelectric element according to claim 8 , wherein the internal electrode contains at least one of Ni and Cu.
11. A liquid discharge head at least comprising a liquid chamber provided with a vibrating unit including the piezoelectric element according to claim 7 and a discharge port communicating with the liquid chamber.
12. A liquid discharge device comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 11 .
13. An ultrasonic motor at least comprising a vibratory body including the piezoelectric element according to claim 7 and a moving body being in contact with the vibratory body.
14. An optical apparatus comprising the ultrasonic motor according to claim 13 in the driving unit.
15. A vibratory device comprising a vibratory body including a diaphragm provided with the piezoelectric element according to claim 7 .
16. A dust removing device comprising a vibrating unit provided with the vibratory device according to claim 15 .
17. An image pickup device at least comprising the dust removing device according to claim 16 and an image pickup element unit, wherein the diaphragm of the dust removing device is disposed on the light-receiving surface side of the image pickup element unit.
18. An electronic apparatus comprising a piezoelectric acoustic component including the piezoelectric element according to claim 7 .
19. A liquid discharge head at least comprising a liquid chamber provided with a vibrating unit including the multilayered piezoelectric element according to claim 8 and a discharge port communicating with the liquid chamber.
20. A liquid discharge head comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 19 .
21. An ultrasonic motor at least comprising a vibratory body including the multilayered piezoelectric element according to claim 8 and a moving body being in contact with the vibratory body.
22. An optical apparatus comprising the ultrasonic motor according to claim 21 in the driving unit.
23. A vibratory device comprising a vibratory body including a diaphragm provided with the multilayered piezoelectric element according to claim 8 .
24. A dust removing device comprising a vibrating unit provided with the vibratory device according to claim 23 .
25. An image pickup device at least comprising the dust removing device according to claim 24 and an image pickup element unit, wherein the diaphragm of the dust removing device is disposed on the light-receiving surface side of the image pickup element unit.
26. An electronic apparatus comprising a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 8 .