Confocal scanner and confocal microscope

1. A confocal scanner comprising:

a first micro lens disk having a plurality of micro lenses arranged thereon;

a second micro lens disk having a plurality of micro lenses, which is arranged in correspondence to an arrangement pattern of the first micro lens disk, and having a common rotation axis to the first micro lens disk;

a third micro lens disk having a plurality of micro lenses for image reversal arranged on one surface thereof and a plurality of pinholes arranged on an other surface thereof, the plurality of micro lenses and the plurality of pinholes being arranged in correspondence with an arrangement pattern of the first micro lens disk, the third micro lens disk having the common rotation axis of the first micro lens disk and being provided on an opposite side to the second micro lens disk with respect to the first micro lens disk; and

a beam splitter configured to guide an illumination light, which is to be irradiated to an object, to the first micro lens disk, and to guide a return light from the object having passed through each micro lens of the first micro lens disk to the corresponding micro lens of the second micro lens disk,

wherein a numerical aperture of each micro lens arranged on the second micro lens disk is greater than a numerical aperture of each micro lens arranged on the first micro lens disk.

2. The confocal scanner according to claim 1 , wherein pinholes are arranged at respective focal positions of the respective micro lenses, which are arranged on the second micro lens disk, on a side opposite to the object.

3. The confocal scanner according to claim 1 ,

wherein the pinholes are arranged at respective focal positions of the respective micro lenses, which are arranged on the first micro lens disk, on a side facing the object.

4. The confocal scanner according to claim 1 , wherein the micro lenses arranged on the second micro lens disk are concave lenses.

5. The confocal scanner according to claim 1 , wherein the numerical aperture of each micro lens arranged on the second micro lens disk is substantially twice as large as the numerical aperture of each micro lens arranged on the first micro lens disk.

6. The confocal scanner according to claim 1 , wherein the illumination light that is to be guided to the first micro lens disk by the beam splitter advances in parallel with an optical axis of each micro lens on the first micro lens disk, and

wherein the confocal scanner comprises:

an optical member configured to correct an optical path shift, which is caused due to the beam splitter, and disposed between the first micro lens disk and the second micro lens disk.

7. A confocal microscope comprising:

the confocal scanner according to claim 1 ;

a light source unit configured to emit an illumination light of a parallel light to the beam splitter;

an objective lens disposed at a first micro lens disk-side; and

a capturing element arranged at a second micro lens disk-side.

8. The confocal microscope according to claim 7 , comprises:

a first variable power optical system disposed between the first micro lens disk and the objective lens; and

a second variable power optical system disposed between the second micro lens disk and the capturing element.

9. A confocal scanner comprising:

a first micro lens disk having a plurality of micro lenses arranged thereon;

a second micro lens disk having a plurality of micro lenses, which is arranged in correspondence to an arrangement pattern of the first micro lens disk, and having a common rotation axis to the first micro lens disk; and

a beam splitter configured to guide an illumination light, which is to be irradiated to an object, to the first micro lens disk, and to guide a return light from the object having passed through each micro lens of the first micro lens disk to the corresponding micro lens of the second micro lens disk,

wherein a numerical aperture of each micro lens arranged on the second micro lens disk is greater than a numerical aperture of each micro lens arranged on the first micro lens disk,

wherein micro lenses for image reversal are arranged at more distant positions than respective focal positions of the respective micro lenses, which are arranged on the first micro lens disk, on a side of the first micro lens disk facing the object, and pinholes are arranged at each focusing position of the illumination lights of the micro lenses for image reversal.

10. A confocal scanner comprising:

a first micro lens disk having a plurality of micro lenses arranged thereon;

a second micro lens disk having a plurality of micro lenses, which is arranged in correspondence to an arrangement pattern of the first micro lens disk, and having a common rotation axis to the first micro lens disk; and

a beam splitter configured to guide an illumination light, which is to be irradiated to an object, to the first micro lens disk, and to guide a return light from the object having passed through each micro lens of the first micro lens disk to the corresponding micro lens of the second micro lens disk,

wherein a numerical aperture of each micro lens arranged on the second micro lens disk is greater than a numerical aperture of each micro lens arranged on the first micro lens disk,

wherein a diameter of each micro lens arranged on the first micro lens disk is smaller than a diameter of each micro lens arranged on the second micro lens disk.

11. A confocal scanner comprising:

a first micro lens disk having a plurality of micro lenses arranged thereon;

a second micro lens disk having a plurality of micro lenses, which is arranged in correspondence to an arrangement pattern of the first micro lens disk, and having a common rotation axis to the first micro lens disk; and

a beam splitter configured to guide an illumination light, which is to be irradiated to an object, to the first micro lens disk, and to guide a return light from the object having passed through each micro lens of the first micro lens disk to the corresponding micro lens of the second micro lens disk,

wherein a numerical aperture of each micro lens arranged on the second micro lens disk is greater than a numerical aperture of each micro lens arranged on the first micro lens disk,

wherein a diameter of each micro lens arranged on the first micro lens disk is smaller than a diameter of each micro lens arranged on the second micro lens disk,

wherein the illumination light that is to be guided to the first micro lens disk by the beam splitter obliquely advances relative to an optical axis of each micro lens on the first micro lens disk.