Apparatus and method for manufacturing thin film, electro-chemical device and method for manufacturing electro-chemical device
A thin film production apparatus which includes: a substrate feeding mechanism configured to continuously feed a substrate; a substrate receiving mechanism configured to receive the substrate; a substrate conveying mechanism; a film formation roller; a first film formation source configured to form a first thin film on a film formation surface of the substrate traveling on an upstream side of the film formation roller in a substrate conveyance direction along the substrate conveying mechanism; and a second film formation source configured to form a second thin film on a roller circumferential surface of the film formation roller. The film formation roller is placed so that the second thin film is joined to the first thin film. The second thin film is formed to a greater thickness and/or at a higher deposition rate than the first thin film.
1. A thin film production apparatus comprising:
a substrate feeding mechanism configured to continuously feed an elongated substrate or a plate substrate;
a substrate receiving mechanism configured to receive the elongated substrate or the plate substrate by winding the elongated substrate thereon or storing the plate substrate therein;
a substrate conveying mechanism configured to convey the substrate from the substrate feeding mechanism to the substrate receiving mechanism;
a film formation roller configured to allow a film to be formed directly on a roller circumferential surface of the roller;
a first film formation source configured to form a first thin film on a film formation surface of the substrate traveling on an upstream side of the film formation roller in a substrate conveyance direction along the substrate conveying mechanism; and
a second film formation source configured to form a second thin film on the roller circumferential surface of the film formation roller, the second film formation source forms the second thin film by deposition of a film formation raw material for the second thin film on the roller circumferential surface of the film formation roller, wherein
the film formation roller is placed on a substrate conveyance route so that a surface of the second thin film formed on the roller circumferential surface of the film formation roller is joined in a face-to-face manner to a surface of the first thin film formed on the film formation surface of the substrate,
the substrate receiving mechanism winds thereon or stores therein the substrate, the first thin film, and the second thin film detached from the film formation roller, which have been integrated together,
the second thin film is formed on the roller circumferential surface of the film formation roller to a greater thickness and/or at a higher deposition rate than the first thin film, and
the second thin film on the roller circumferential surface of the film formation roller is transferred directly from the film formation roller onto the first thin film by joining the surface of the first thin film and the surface of the second thin film in a face-to-face manner.
2. The thin film production apparatus according to claim 1 , wherein a single combined film formation source serves both as the first film formation source and the second film formation source.
3. The thin film production apparatus according to claim 1 , further comprising a junction-enhancement mechanism configured to enhance junction between the first thin film and the second thin film that are joined in a face-to-face manner.
4. The thin film production apparatus according to claim 3 , wherein the junction-enhancement mechanism is
(A) a mechanism configured to provide at least one of heat and pressure to the first thin film and the second thin film that have been joined in a face-to-face manner,
(B) a mechanism configured to emit an ultrasonic wave or a laser beam to the first thin film and the second thin film that have been joined in a face-to-face manner, or
(C) an adhesive agent applying unit configured to apply an adhesive agent to the surface of the first thin film on the film formation surface of the substrate or to the surface of the second thin film on the roller circumferential surface of the film formation roller.
5. The thin film production apparatus according to claim 1 , further comprising a release agent applying unit configured to apply a release agent to the roller circumferential surface of the film formation roller.
6. The thin film production apparatus according to claim 5 , wherein
the release agent is a liquid, and
the release agent applying unit comprises a mechanism configured to vaporize the release agent.
7. The thin film production apparatus according to claim 1 , wherein the first film formation source and the second film formation source are adapted to foul′ thin films having the same composition.
8. The thin film production apparatus according to claim 7 , wherein the first film formation source and the second film formation source are adapted to form thin lithium films.
9. The thin film production apparatus according to claim 1 , wherein the elongated substrate or the plate substrate engages the first film formation source prior to contacting the film formation roller.
10. The thin film production apparatus according to claim 1 , wherein the second thin film is transferred directly from the film formation roller onto the first thin film.
11. The thin film production apparatus according to claim 1 , wherein the first film formation source is located downstream of the substrate feeding mechanism in the substrate conveyance direction.
12. The thin film production apparatus according to claim 1 , wherein the first film formation source is placed on an upstream side of the film formation roller in the substrate conveyance direction.