Apparatus for deposition and substrate alignment method in the same
A deposition apparatus is disclosed. In one aspect, the apparatus includes a metal sheet of which an edge portion is integrally combined with a sheet frame and an electrostatic chuck attached to a bottom surface of the metal sheet and configured to pull a substrate based on a static electricity force. The apparatus also includes a metal mask placed below the electrostatic chuck, wherein an edge portion of the metal mask is combined with a mask frame, and wherein the metal mask has a predetermined patterned opening where the substrate is mounted to the upper surface thereof. The apparatus further includes a magnet plate placed above the metal sheet, and configured to pull the metal mask based on a magnetic force so as to attach the substrate to the electrostatic chuck.
1. A deposition apparatus comprising:
a metal sheet of which an edge portion is integrally combined with a sheet frame;
an electrostatic chuck attached to a bottom surface of the metal sheet and configured to Pull a substrate based on a static electricity force;
a metal mask placed below the electrostatic chuck, wherein an edge portion of the metal mask is combined with a mask frame, and wherein the metal mask has a predetermined patterned opening where the substrate is mounted to an upper surface thereof;
a magnet plate placed above the metal sheet, and configured to pull the metal mask based on a magnetic force so as to attach the substrate to the electrostatic chuck wherein the magnet plate, the metal sheet, the electrostatic chuck, the metal mask, and a deposition source are placed inside the chamber, and a deposition source is configured to supply a deposition material to the metal mask.
2. The deposition apparatus of claim 1 , further comprising:
a sheet frame driver configured to transfer the sheet frame up or down; and
a magnet plate driver configured to transfer the magnet plate up or down.
3. The deposition apparatus of claim 1 , wherein the electrostatic chuck comprises a film type of electrostatic chuck.
4. The deposition apparatus of claim 1 , wherein the electrostatic chuck is configured to be attached to the metal sheet while being convex downward.
5. The deposition apparatus of claim 1 , wherein the magnet plate is formed of a permanent magnet or an electromagnet.
6. The deposition apparatus of claim 1 , wherein the metal mask comprises a fine metal mask.
7. The deposition apparatus of claim 1 , wherein the metal sheet and the electrostatic chuck have substantially the same curvature.
8. The deposition apparatus of claim 1 , wherein the magnet plate is placed directly above the metal sheet.
9. The deposition apparatus of claim 1 , wherein the electrostatic chuck is configured to be placed directly above the substrate.
10. The deposition apparatus of claim 1 , wherein the magnet plate, the metal sheet, the electrostatic chuck and the metal mask overlap in the direction of the magnetic force.