Semiconductor device
There is provided a semiconductor device including a memory region and a logic region. The memory region includes a transistor (memory transistor) that stores information by accumulating charge in a sidewall insulating film. The width of the sidewall insulating film of the memory transistor included in the memory region is made larger than the width of a sidewall insulating film of a transistor (logic transistor) included in the logic region.
1. A semiconductor device comprising:
a first transistor, the first transistor including:
a first gate insulating film provided above a semiconductor substrate;
a first gate electrode provided above the first gate insulating film;
a first sidewall insulating film provided on a sidewall of the first gate electrode and above the semiconductor substrate;
a first source region and a first drain region that are provided in the semiconductor substrate on both sides of the first gate electrode, respectively, and contain a first impurity of a first conductivity type;
a first channel region provided in the semiconductor substrate between the first source region and the first drain region; and
a first impurity region that is provided in the semiconductor substrate below the first channel region and contains a second impurity of a second conductivity type different from the first conductivity type, the second impurity having a higher concentration than a third impurity of the first channel region,
wherein the first transistor stores information by accumulating charge in the first sidewall insulating film, and
the semiconductor device, further comprising:
a word line group;
a bit line group;
a ground line group; and
the first transistor provided in plurality,
wherein each of the plurality of first transistors has the first gate electrode connected to one word line of the word line group, and
one of the first source region and the first drain region connected to one bit line of the bit line group, and the other one connected to one ground line of the ground line group.
2. The semiconductor device according to claim 1 , wherein the first transistor further includes a second impurity region which is provided on an inner side of the first source region and the first drain region in the semiconductor substrate below the first sidewall insulating film and which contains a fourth impurity of the first conductivity type having a lower concentration than the first impurity of the first source region and the first drain region.
3. The semiconductor device according to claim 2 , wherein a concentration of the fourth impurity is equal to or less than 5×10 17 cm −3 .
4. The semiconductor device according to claim 1 , wherein the first impurity of the first conductivity type in the first source region and the first drain region contains phosphorus.
5. The semiconductor device according to claim 1 , wherein the first impurity region contacts the first source region and the first drain region.
6. The semiconductor device according to claim 1 , further comprising a third impurity region that is provided in the semiconductor substrate below the first impurity region and contains a fifth impurity of the second conductivity type having a higher concentration than the third impurity of the first channel region.
7. The semiconductor device according to claim 1 , further comprising:
a memory region; and
a logic region,
wherein the memory region includes the first transistor, and
wherein the logic region includes a second transistor including:
a second gate insulating film provided above the semiconductor substrate,
a second gate electrode provided above the second gate insulating film,
a second sidewall insulating film provided on a sidewall of the second gate electrode and above the semiconductor substrate;
a second source region and a second drain region provided in the semiconductor substrate on both sides of the second gate electrode, respectively; and
a second channel region provided in the semiconductor substrate between the second source region and the second drain region.
8. The semiconductor device according to claim 7 , wherein the second source region and the second drain region contain a sixth impurity of the first conductivity type, and
wherein the second transistor further includes a fourth impurity region that is provided in the semiconductor substrate below the second channel region and contains a seventh impurity of the second conductivity type having a higher concentration than an eighth impurity of the second channel region.
9. The semiconductor device according to claim 7 , wherein a concentration distribution of the first impurity contained in the first source region and the first drain region in the semiconductor substrate is steeper than a concentration distribution of the sixth impurity contained in the second source region and the second drain region.
10. The semiconductor device according to claim 7 , wherein a width of the first sidewall insulating film is larger than a width of the second sidewall insulating film.
11. The semiconductor device according to claim 1 , wherein the first sidewall insulating film includes a stacked structure of an oxide film and a nitride film.