Contact probe
The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layer 12 between outer metallic layers 11 and 13 , and includes: a contact part 2 that is brought into abutting with a test object; an elastic deformation part 4 that is elastically deformed so as to be curved in a predetermine direction of curvature N by compression force in the longer direction; and a fore end part 3 that is formed between the contact part 2 and the elastic deformation part 4 and supported by a through-hole 121 of a guide plate 120 so as to make the contact part 2 movable in the longer direction, in which side surfaces of the fore end part 3 formed in the direction of curvature N and a direction N′ opposite to the N of the elastic deformation part 4 are configured to include the three metallic layers 11 to 13 , and on the side surfaces, the intermediate metallic layer 12 is configured to protrude relative to the outer metallic layers 11 and 13.
1. A contact probe comprising:
a contact part that is brought into abutting with a test object;
a terminal part that is electrically connected to a wiring board;
an elastic deformation part that is provided between said contact part and said terminal part, and curved to define a direction of curvature in advance, and elastically deformed to increase said curvature by compression force in a longitudinal direction; and
a sliding part that is supported by a through-hole of a guide plate movably in the longitudinal direction, wherein
said sliding part has a stacked structure of which an intermediate layer is sandwiched by outer layers and a stack surface extends in the longitudinal direction, and on a side surface thereof, said intermediate layer protrudes relative to said outer layers towards an inner surface of said though-hole in said direction of curvature and in an opposite direction of said direction of curvature, and
wherein the direction of curvature is a direction of bowing of the elastic deformation part that is perpendicular to the longitudinal direction of the elastic deformation part.
2. The contact probe according to claim 1 , wherein
on said side surface of said sliding part, a plating layer is formed so as to cover the intermediate layer and the outer layers.
3. The contact probe according to claim 1 , wherein
said sliding part is formed between said contact part and said elastic deformation part.
4. The contact probe according to claim 1 , wherein
said sliding part is formed between said terminal part and said elastic deformation part.
5. The contact probe according to claim 1 , wherein:
said elastic deformation part includes an elongate plate-like body;
said plate-like body has a first layer made of a first metal, second layers formed so as to sandwich said first layer in a width direction and made of a second metal, and a third layer that is formed so as to cover said first layer on a principal surface of said plate-like body and made of a third metal;
the first metal has smaller electrical resistivity than the second metal; and
the second metal and the third metal have higher mechanical strength as compared with the first metal.
6. The contact probe according to claim 5 , wherein:
said elastic deformation part includes two or more of said plate-like bodies that are arranged so as to make adjacent principal surfaces face each other through a gap; and
said plate-like bodies are mutually connected at both ends in the longitudinal direction.
7. The contact probe according to claim 6 , wherein
said third film layer is formed on outer principal surfaces of said plate-like bodies arranged on both sides, and not formed on the principal surfaces adjacent to said gap.
8. The contact probe according to claim 7 , comprising
three or more plate-like bodies, wherein
said plate-like bodies have substantially a same thickness as each other.
9. The contact probe according to claim 5 , wherein said third layer is a thin film layer, and wherein
on said thin film layer, an insulating film is formed.
10. The contact probe according to claim 2 , wherein
said sliding part is formed between said contact part and said elastic deformation part.
11. The contact probe according to claim 2 , wherein
said sliding part is formed between said terminal part and said elastic deformation part.
12. The contact probe according to claim 2 , wherein:
said elastic deformation part includes an elongate plate-like body;
said plate-like body has a first layer made of a first metal, second layers formed so as to sandwich said first layer in a width direction and made of a second metal, and a third layer that is formed so as to cover said first layer on a principal surface of said plate-like body and made of a third metal;
the first metal has smaller electrical resistivity than the second metal; and
the second metal and the third metal have high mechanical strength as compared with the first metal.
13. The contact probe according to claim 6 , wherein said third layer is a thin film layer, and wherein
on said thin film layer, an insulating film is formed.
14. The contact probe according to claim 7 , wherein said third layer is a thin film layer, and wherein
on said thin film layer, an insulating film is formed.
15. The contact probe according to claim 8 , wherein said third layer is a thin film layer, and wherein
on said thin film layer, an insulating film is formed.