Scratch-resistant materials and articles including the same
Embodiments of this disclosure pertain to a coating material comprising silicon and/or aluminum, hydrogen and any two or more of oxygen, nitrogen, carbon, and fluorine. The coating material exhibits a hardness of about 17 GPa or greater and an optical band gap of about 3.5 eV or greater. In some embodiments, the coating material includes, in atomic %, silicon and/or aluminum in an amount of about 40 or greater, hydrogen in an amount in the range from about 1 to about 25, nitrogen in an amount of about 30 or greater, oxygen in an amount in the range from about 0 to about 7.5, and carbon in an amount in the range from about 0 to about 10. The coating material may optionally include fluorine and/or boron. Articles including the coating material are also described and exhibit an average transmittance of about 85% or greater over an optical wavelength regime in the range from about 380 nm to about 720 nm and colorlessness.
1. A coating composition comprising, in atomic %:
silicon, aluminum or a combination thereof in an amount of about 35 or greater;
hydrogen in an amount in the range from about 1 to about 30;
nitrogen in an amount of about 30 or greater;
oxygen in an amount in the range from about 0 to about 7.5;
carbon in an amount in the range from about 0 to about 10; and
fluorine in an amount in the range from about 0 to about 5;
wherein the ratio of nitrogen (atomic %) to silicon (atomic %) is about 0.8 or greater.
2. The coating composition of claim 1 , further comprising boron.
3. The coating composition of claim 1 , wherein the silicon, aluminum or a combination thereof is present in an amount in the range from about 37 atomic % to about 50 atomic %.
4. The coating composition of claim 1 , wherein hydrogen is present in an amount in the range from about 15 atomic % to about 28 atomic %.
5. The coating composition of claim 1 , wherein nitrogen is present in an amount in the range from about 30 atomic % to about 45 atomic %.
6. The coating material composition of claim 1 , further comprising an optical band gap in the range from about 3.5 eV to about 5.5 eV.
7. The coating material composition of claim 1 , further comprising a Young's modulus of about 150 GPa or greater and a compressive stress of about −400 MPa or greater.
8. The coating material composition of claim 1 , further exhibiting a maximum hardness of about 17 GPa or greater, as measured by a Berkovich Indenter Test along an indentation depth of about 50 nm or greater.
9. The coating material composition of claim 1 , wherein oxygen is present in an amount in the range from about 0.1 atomic % to about 7.5 atomic %.
10. The coating material composition of claim 1 , wherein carbon is present in an amount in the range from about 0.1 atomic % to about 10 atomic %.
11. The coating material composition of claim 1 , wherein fluorine is present in an amount in the range from about 0.1 atomic % to about 5 atomic %.