IP Library Granted Patent US 9,797,063
Granted Patent B2
US 9,797,063 · App. 13/307,253 · Granted Oct 24, 2017

Vitreous silica crucible

Inventors: Toshiaki Sudo (Akita, JP); Hiroshi Kishi (Akita, JP); Eriko Suzuki (Akita, JP)
Assignee: SUMCO CORPORATION
C30B15/10C03B19/095Y10T117/1032
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Quick Facts
Patent No.
US 9,797,063
App. No.
13/307,253
Granted
Oct 24, 2017
Kind
B2
Abstract

The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible without fear of mixing of impurities into silicon melt. According to the present invention, provided is a vitreous silica crucible for pulling a silicon single crystal, wherein a ratio I2/I1 is 0.67 to 1.17, where I1 and I2 are area intensities of the peaks at 492 cm −1 and 606 cm −1 , respectively, in Raman spectrum of vitreous silica of the region having a thickness of 2 mm from an outer surface to an inner surface of a wall of the crucible.

Claims (4)

1. A vitreous silica crucible for pulling a silicon single crystal, wherein a ratio of the presence of planar three-member ring structure to the presence of planar four-member ring structure in the vitreous silica crucible is specified as a ratio I2/I1 which is 0.67 to 1.17, where I1 and I2 are area intensities of peaks at 492 cm −1 and 606 cm −1 , respectively, in Raman spectrum of vitreous silica of a region having a thickness of 2 mm from an outer surface to an inner surface of a wall of the crucible.

2. The crucible of claim 1 , wherein the vitreous silica of the region contains a mineralizing element in an amount of 20 ppm or less.

3. The crucible of claim 2 , wherein the vitreous silica of the region contains inevitably included impurities.

4. The crucible of claim 1 , wherein the ratio I2/I1 of the region is 0.67 to 1.17 only at a sidewall portion or only at a sidewall portion and corner portion of the crucible.

Assignments (2)
MERGER Recorded Feb 26, 2016
From: JAPAN SUPER QUARTZ CORPORATION
To: SUMCO CORPORATION
Reel/Frame 037843/0779 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 30, 2011
From: SUDO, TOSHIAKI; KISHI, HIROSHI; SUZUKI, ERIKO
To: JAPAN SUPER QUARTZ CORPORATION
Reel/Frame 027299/0157 →
Priority Claims (1)
JP 2010-267590 · Nov 30, 2010 · national
Continuity (1)
Related Publication 20120132133A1 · May 31, 2012