Vertical floating gate NAND with selectively deposited ALD metal films

1. A method of making a monolithic three dimensional NAND string comprising a semiconductor channel layer and a plurality of control gate electrodes, the method comprising:

forming a stack of alternating first material layers and second material layers over a substrate, wherein the first material comprises an electrically insulating material and the second material is different from the first material, wherein the first material layers comprise silicon oxide layers, and the second material layers comprise silicon nitride layers or polysilicon layers;

etching the stack to form a front side opening in the stack;

selectively forming a plurality of discrete charge storage regions using atomic layer deposition, wherein the plurality of discrete charge storage regions comprises at least one of a metal or an electrically conductive metal oxide, wherein the step of selectively forming the plurality of discrete charge storage regions using atomic layer deposition comprises selectively forming the plurality of discrete charge storage regions using atomic layer deposition on exposed portions of the second material layers in the front side opening but not on exposed portions of the first material layers in the front side opening, and the plurality of discrete charge storage regions comprise ruthenium regions;

selectively recessing portions of the first material layers in the front side opening after the step of selectively forming the plurality of discrete charge storage regions using atomic layer deposition on exposed portions of the second material layer;

forming silicon oxide etch stop regions between the discrete charge storage regions and the second material layers which comprise polysilicon layers by selectively oxidizing portions of the polysilicon layers located adjacent to the discrete charge storage regions through the front side opening using a water vapor atmosphere;

forming a tunnel dielectric over the discrete charge storage regions in the front side opening;

forming the semiconductor channel layer over the tunnel dielectric in the front side opening;

etching the stack to form a back side opening in the stack;

removing the second material layers through the back side opening using the silicon oxide etch stop regions as an etch stop to form back side recesses between the first material layers;

forming a blocking dielectric in the back side recesses through the back side opening; and

forming the plurality of control gate electrodes over the blocking dielectric in the back side recesses through the back side openings.

2. A method of making a monolithic three dimensional NAND string comprising a semiconductor channel layer and a plurality of control gate electrodes, the method comprising:

forming a stack of alternating first material layers and second material layers over a substrate, wherein the first material comprises an electrically insulating material and the second material is different from the first material;

etching the stack to form a front side opening in the stack;

forming an etch stop layer and a charge storage dielectric layer over the etch stop layer in the front side opening;

forming a tunnel dielectric over the discrete charge storage regions in the front side opening such that the tunnel dielectric is located over the charge storage dielectric layer;

forming the semiconductor channel layer over the tunnel dielectric in the front side opening;

etching the stack to form a back side opening in the stack;

removing the second material layers through the back side opening using the etch stop layer as an etch stop to form back side recesses between the first material layers;

removing portions of the etch stop layer exposed in the back side recesses to expose portions of the charge storage dielectric layer in the back side recesses between the first material layers;

selectively forming a plurality of discrete charge storage regions using atomic layer deposition, wherein the plurality of discrete charge storage regions comprises at least one of a metal or an electrically conductive metal oxide;

forming a blocking dielectric in the back side recesses through the back side opening; and

forming the plurality of control gate electrodes over the blocking dielectric in the back side recesses through the back side openings;

wherein the step of selectively forming the plurality of discrete charge storage regions using atomic layer deposition comprises selectively forming the plurality of discrete charge storage regions using atomic layer deposition on exposed portions of the charge storage dielectric layer in the back side recesses but not on exposed portions of the first material layers in the back side recesses.

3. The method of claim 1 , wherein the discrete charge storage regions comprise a metal floating gate.

4. The method of claim 1 , wherein the discrete charge storage regions comprise a metal oxide floating gate.

5. The method of claim 1 , wherein the discrete charge storage regions comprise a metal and a metal oxide floating gate.

6. The method of claim 1 , wherein the plurality of discrete charge storage regions comprises a plurality of ruthenium floating gates as the ruthenium regions.

7. The method of claim 2 , wherein:

the first material layers comprise silicon oxide layers;

the second material layers comprise silicon nitride layers or polysilicon layers; and

the plurality of discrete charge storage regions comprise ruthenium regions.

8. The method of claim 2 , wherein the discrete charge storage regions comprise a metal floating gate.

9. The method of claim 2 , wherein the discrete charge storage regions comprise a metal oxide floating gate.

10. The method of claim 2 , wherein the discrete charge storage regions comprise a metal and a metal oxide floating gate.

11. The method of claim 2 , wherein the plurality of discrete charge storage regions comprises a plurality of ruthenium floating gates.