Method of making a current sensor and current sensor
A method of making a current sensor is described. The method includes providing a leadframe having a current conductor portion comprising two sections shaped such that a current to be measured flows in directions oriented obliquely or oppositely with respect to each other. Further, the method includes deforming the leadframe to lower the current conductor portion, and mounting an isolator on the current conductor portion. The method also includes mounting a semiconductor chip having a thickness of at least 0.2 mm and comprising two magnetic field sensors composed of four Hall sensors and magnetic field concentrators on the isolator, connecting the semiconductor chip and sensor terminal leads by wire bonds, packaging the semiconductor chip and parts of the leadframe in a plastic housing, and cutting a frame of the leadframe from current terminal leads and the sensor terminal leads.
1. A method of making a current sensor, the method comprising the following steps:
providing a leadframe configured with current terminal leads, sensor terminal leads and a current conductor portion integrally coupled to the current terminal leads, the current conductor portion comprising two sections which are shaped in such a way that a current to be measured flows in directions which are oriented obliquely or oppositely with respect to each other,
deforming the leadframe to bring the current conductor portion in a position which is lowered with respect to the sensor terminal leads, then
mounting an isolator on the current conductor portion,
providing a semiconductor chip having a thickness of at least 0.2 mm and comprising
four Hall sensors, each Hall sensor integrated at an active surface of the semiconductor chip and providing a Hall output signal,
magnetic field concentrators arranged on the active surface of the semiconductor chip, and
electronic circuitry integrated at the active surface to operate the Hall sensors and to process the Hall output signals of the Hall sensors in order to provide a current sensor output signal which is proportional to the current flowing through the current conductor portion, wherein two of the Hall sensors and one or more of the magnetic field concentrators form a first magnetic field sensor and wherein the other two of the Hall sensors and one or more others of the magnetic field concentrators form a second magnetic field sensor,
mounting the semiconductor chip on the isolator such that a back surface of the semiconductor chip which is opposite to the active surface faces the isolator, then
connecting the semiconductor chip and the sensor terminal leads by wire bonds, then
placing the leadframe in a cavity of a mold, then
molding the semiconductor chip and associated parts of the leadframe with plastic material in order to package the semiconductor chip and the named associated parts of the leadframe in a plastic housing, and then
cutting a frame of the leadframe from the current terminal leads and the sensor terminal leads.
2. The method of claim 1 , further comprising applying a stress buffer on top of the magnetic field concentrators and on top of the semiconductor chip, respectively.
3. The method of claim 2 , wherein the leadframe has a uniform thickness.
4. The method of claim 2 , wherein the magnetic field concentrators arranged on the active surface of the semiconductor chip are made by electroplating.
5. The method of claim 4 , wherein the isolator protrudes over the edges of the semiconductor chip and comprises a ceramics or glass plate.
6. The method of claim 2 , wherein the isolator protrudes over the edges of the semiconductor chip.
7. The method of claim 1 , wherein the leadframe has a uniform thickness.
8. The method of claim 1 , wherein the magnetic field concentrators arranged on the active surface of the semiconductor chip are made by electroplating.
9. The method of claim 8 , wherein the isolator protrudes over the edges of the semiconductor chip and comprises a ceramics or glass plate.
10. The method of claim 1 , wherein the isolator protrudes over the edges of the semiconductor chip.
11. A current sensor, comprising
a plastic housing,
current terminal leads and sensor terminal leads protruding out of the housing,
a current conductor portion through which a current to be measured flows, the current conductor portion integrally coupled to the current terminal leads and packaged in the housing,
wherein
the current conductor portion is formed with two sections which are arranged in such a way that the current to be measured flows in the two sections in directions which are oriented obliquely or oppositely with respect to each other, and
the current conductor portion is in a position which is lowered with respect to the sensor terminal leads,
an isolator is mounted on the current conductor portion,
a semiconductor chip is mounted on the isolator, the semiconductor chip having a thickness of at least 0.2 mm and comprising
four Hall sensors, each Hall sensor integrated at an active surface of the semiconductor chip and providing a Hall output signal,
magnetic field concentrators arranged on the active surface of the semiconductor chip, and
electronic circuitry integrated at the active surface to operate the Hall sensors and to process the Hall output signals of the Hall sensors in order to provide a current sensor output signal which is proportional to the current flowing through the current conductor portion, wherein two of the Hall sensors and one or more of the magnetic field concentrators form a first magnetic field sensor and wherein the other two of the Hall sensors and one or more others of the magnetic field concentrators form a second magnetic field sensor, and
wire bonds connecting the semiconductor chip and the sensor terminal leads, wherein a back surface of the semiconductor chip which is opposite to the active surface faces the isolator.
12. The current sensor of claim 11 , further comprising a stress buffer applied on top of the magnetic field concentrators and on top of the semiconductor chip, respectively.
13. The current sensor of claim 12 , wherein the current terminal leads, the sensor terminal leads and the current conductor portion have a uniform thickness.
14. The current sensor of claim 12 , wherein the magnetic field concentrators arranged on the active surface of the semiconductor chip are electroplated.
15. The current sensor of claim 14 , wherein the isolator protrudes over the edges of the semiconductor chip and comprises a ceramics or glass plate.
16. The current sensor of claim 12 , wherein the isolator protrudes over the edges of the semiconductor chip.
17. The current sensor of claim 11 , wherein the current terminal leads, the sensor terminal leads and the current conductor portion have a uniform thickness.
18. The current sensor of claim 11 , wherein the magnetic field concentrators arranged on the active surface of the semiconductor chip are electroplated.
19. The current sensor of claim 18 , wherein the isolator protrudes over the edges of the semiconductor chip and comprises a ceramics or glass plate.
20. The current sensor of claim 11 , wherein the isolator protrudes over the edges of the semiconductor chip.